[PC-6-5] Atomic-Scale Planarization of 6-Inch Si(001) Substrate by UHV Heating

Ken IDOTA、Masaaki NIWA、Isao SUMITA (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.、2.Matsushita Research Institute Tokyo, Inc.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-7-1] Characterization of Surface Potential of Si-SiO2 Interface by Photoreflectance Spectroscopy

Akira Fujimoto Takaaki Imai、Masanori Okuyama、Yoshihiro Hamakawa (1.Department of Electrical Engineering, Wakayama National College of Technology、2.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-7-2] Gas-Surface Interaction Influence on Electrical Properties of New Gas Sensitive Metal Oxide-Metal Sandwich Structure

Algirdas GALDIKAS、Audruzis MIRONAS、Daiva SENULIENE、Arunas SETKUS (1.Semiconductor Sensors Laboratory, Semiconductor Physics Institute)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-7-3] Angle Position Detection Using a Novel Double Hollow Four Quadrant Orientation Detector for Application to Pattern Recognition

Kang-Cheng Lin、Si-Chen Lee (1.Department of Electrical Engineering, National Taiwan University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-7-4] Effects of Dielectrics on the Characteristics of Large-Area Silicon Microstrip Sensors

Wen-Chin Tsay、Yen-Ann Chen、Jyh-Wong Hong A. Chen、Willis T. Lin、Y. H. Chang、S. R. Hou、S. L. Hsu、C. R. Li、Hsien-Jen Ting、Song-Tsang Chiang (1.Department of Electrical Engineering、2.Department of Physics National Central University、3.Electronics Research & Service Organization ITRI)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-7-5] Modeling and Analysis of RF Plasma Using Electrical Equivalent Circuit

Kazuhide INO、Tadahiro OHMI (1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University、2.Laboratory for Electronic Intelligent Systems, Research Institute of Electrical Communication, Tohoku University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-8-1] Effects of Channel Thickness on Poly-Crystalline Silicon Thin Film Transistors

Mitsutoshi MIYASAKA、Tadakazu KOMATSU、Wataru ITOH、Akemi YAMAGUCHI、Hiroyuki OHSHIMA (1.SEIKO EPSON CORPORATION Active Device Research Laboratory / Analysis Center)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-8-2] Back-Gate Effects of Amorphous-Si TFTs with an Inorganic Black Matrix on Array

Yoshimine KATO、Yoshimasa KAIDA、Yuki MIYOSHI、Masakazu ATSUMI、Steven L. WRIGHT、Lauren F. PALMATEER (1.Display Technology, IBM Japan、2.IBM Thomas J. Watson Research Center)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-8-3] Application of Electron Cyclotron Resonance Plasma Thermal Oxidation to Bottom Gate Polysilicon Thin Film Transistors

Jung-In Han、Jung-Yeal Lee、Deuk-Sung Choi、Choong-Ki Kim、Chul-Hi Han (1.Center for Electro-Optics Department of Electrical Engineering, Korea Advanced Institute of Science and Technology、2.Semiconductor R/D Lab. of Hyundai Electronics Industries Co., Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-8-4] Self-Aligned Offset Gated Poly-Si TFTs by Employing a Photo Resistor Reflow Process

Cheol-Min Park、Byung-Hyuk Min、Keun-Ho Jang、Jae-Hong Jun、Min-Koo Han (1.Dept. of Electrical Engineering, Seoul National University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

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