[A-8-2] Nano-Probe Sensing and Multi-Probe Data Storage

Takahito Ono、Masayoshi Esashi (1.Faculty of Engineering, Tohoku University、2.New Industry Creation Hatchery Center, Tohoku University)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-9-1] Uncooled Infrared Focal Plane Arrays Using Micromachining Technology

Masafumi Kimata、Tomohiro Ishikawa、Yoshiyuki Nakaki、Masashi Ueno、Hirofumi Yagi、Hisatoshi Hata、Osamu Kaneda、Takanori Sone (1.Advanced Technology R & D Center, Mitsubishi Electric Corporation)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-9-2] Optical MEMS

Hiroki Kuwano (1.NTT Cyber Solution Laboratories, Nippon Telegraph and Telephone Corporation)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-9-3] Micro Power Generation Programs at DARPA

William C. Tang (1.Program Manager, Microsystems Technology Office, Defense Advanced Research Projects Agency)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-10-2-1] Bio-Nanotechnology Through Microsystems

Masao Washizu、Osamu Kurosawa、Hiroyuki Kabata (1.Kyoto University, Department of Mechanical Engineering)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-10-2-2-1] Electrostatically Levitated Rotational Gyroscope

T. Murakoshi、K. Fukatsu、M. Esashi (1.TOKIMEC Inc.、2.Tohoku University, New Industry Creation Hatchery Center)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-10-2-2-2] Electrostatically Levitated Ball MEMS

Risaku Toda、Nobuo Takeda、Takao Murakoshi、Shigeru Nakamura、Masayoshi Esashi (1.Ball Semiconductor Inc.、2.Tokimec Inc.、3.Tohoku University, New Industry Creation Hatchery Center)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-1] Extremely High Hole Mobility in SiGe/Ge/SiGe/ Heterostructures Characterized by Mobility Spectrum Analysis

T. Irisawa、O. A. Mironov、M. Myronov、S. Koh、Y. Shiraki (1.Department of Applied Physics, The University of Tokyo、2.Department of Physics, The University of Warwick)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-2] Novel SiGe-on-Insulator Virtual Substrate Fabricated by Self-Melt-Solidification

Nobuyuki Sugii、Shinya Yamaguchi、Katsuyoshi Washio (1.Central Research Laboratory, Hitachi, Ltd.)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-3] Mechanism of Improved Thermal Stability of B in Poly-SiGe Gate on SiON

Taizoh Sadoh、 Fitrianto、Atsushi Kenjo、Akihiro Miyauchi、Hironori Inoue、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Hitachi Research Laboratory, Hitachi)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

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