The Japan Society of Applied Physics

338 results (251 - 260)

[B-10-3] Characterization of Oxygen Vacancies in SrTiO3 Thin Films by Auger Electron Spectroscopy and Its Application to Leakage Current Reduction of Ru/SrTiO3/Ru Capacitor

S. Niwa, S. Yamazaki, M. Kiyotoshi, J. Nakahira, M. Nakabayashi, C. M. Chu, K. Eguchi (1.Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation, 2.ULSI Technology Development Division, Fujitsu Limited, 3.DRAM Process Integration and Module Technology Department, Winbond Electronics Corporation)

2001 International Conference on Solid State Devices and Materials |PDF Download

338 results (251 - 260)