[C-8-4] Direct evidence of localized states in high-k materials for gate insulator - Cathode luminescence study of HfO2 films -

Satoshi Yamasaki、J-W Park (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC) National Institute of Advanced Industrial Science and Technology (AIST)、2.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET))

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-1] 0.1 μm pMOSFETs with SiGe-Channel and B-Doped SiGe Source/Drain Layers

Doohwan LEE、Masao SAKURABA、Junichi MUROTA、Toshiaki TSUCHIYA (1.Laboratory for Electronic Intelligent Systems, Res. Inst. of Electr. Comm., Tohoku Univ.、2.Interdisciplinary Faculty of Science and Engineering, Shimane Univ.)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-2] Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno、Isao Tsunoda、Atsushi Kenjo、Taizoh Sadoh、Shinya Yamaguchi、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Central Research Lab., Hitachi Ltd.)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-3] Boron doped Polycrystalline Si1-XGeX Resistors for High Precision Analog ICs

H. Watanabe、M. Tamura、M. Dainin、M. Seto、T. Shohbu、Y. Ohsako、Y. Takimoto、Y. Ishimoto、H. Ino、E. Imanishi、M. Satoh、H. Satoh、K. Yamashita、K. Taniguchi (1.Electronic Devices Company, Ricoh Co. Ltd.、2.Department of Electronics and Information Systems, Faculty of Engineering, Osaka University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-4] Control of 2 type Dielectric Relaxation Current of Ta2O5 Metal-Insulator-Metal[MIM]Capacitors

Masahiro Kiyotoshi、Katsuhiko Hieda、Yoshiaki Fukuzumi、Yusuke Kohyama、Toshiya Suzuki、Daisuke Matsunaga、Koichi Hashimoto (1.Toshiba Corporation、2.Fujitsu Limited)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-9-5] Electrical Properties of High-k MIM Interlevel Capacitors Prepared for RF-CMOS Device Applications

M. Tarutani、K. Shintani、T. Mori、K. Nishikawa、Y. Hashizume、S. Yamakawa、H. Takada、T. Oomori (1.Advanced Technology R&D Center, Mitsubishi Electric Corp.)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-1-1] Au Bump Interconnection with Ultrasonic Flip-chip Bonding in 20μm pitch

Kazumasa Tanida、Mitsuo Umemoto、Ryoichi Kajiwara、Yoshihiro Tomita、Yukiharu Akiyama、Kenji Takahashi (1.Association of Super-Advanced Electronics Technologies (ASET) Electronic System Integration Technology Research Department, Tsukuba Research Center)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-1-2] Novel Affinity Microchip Electrophoresis for Gene Mutation Assay

Tohru Takarada、Yuzo Hamaguchi、Masako Ogawa、Mizuo Maeda (1.Department of Applied Chemistry, Graduate School of Engineering, Kyushu University、2.Bioengineering Laboratory, The Institute of Physical and Chemical Research (RIKEN))

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-1-3] Biochip Technology for Immunosensors

Shigeru Kurosawa、Jong-Won Park、Miki Nakamura、Mitsuhiro Tozuka、Hidenobu Aizawa (1.National Institute of Advanced Industrial Science and Technology (AIST)、2.Nihon University、3.Musashi Institute of Technology、4.NEDO)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-7-1] Future Electron Devices and SOI Technology

Toshiro Hiramoto、Toshiki Saito、Toshiharu Nagumo (1.Institute of Industrial Science, University of Tokyo)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

428件中(381 - 390)

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