[C-6-2] Control of Pore Size and Porosity in Periodic Porous Silica Low-k Films

N. Hata、C. Negoro、K. Yamada、T. Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center, AIST Tsukuba-West、2.Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology、3.MIRAI Project, Association of Super-Advanced Electronics Technology, AIST Tsukuba-West、4.Research Center for Nanodevices and Systems, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-3] Off-time Dependence of Pulsed DC Electromigration MTF of Cu Multilevel Interconnection

K. Oshima、T. Ishida、S. Miyazaki、T. Takahagi、S. Shingubara (1.Hiroshima University, Graduate School of ADSM)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-4] CVD-Al/Flow-Al Technology for Filling Large Aspect Ratio Contact Holes

Manabu Sakamoto、Tomoharu Aoki、Kazuya Masu、Se Ju Lim、Masanobu Hatanaka、Michio Ishikawa、Yuji Furumura (1.Precision and Intelligence Laboratory, Tokyo Institute of Technology、2.Institute for Semiconductor Technologies, ULVAC Inc.、3.Philbridge Inc.)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-1] Towards Printed Organic Electronics: Semiconductor Materials Design for Plastic Transistors

Beng S. Ong (1.Materials Design and Integration Laboratories Xerox Research Centre of Canada)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-2] Self-Alignment Organic Field-Effect Transistor using Back-Side Exposure Method

Takahiro Hyodo、Fumiya Morita、Shigeki Naka、Hiroyuki Okada、Hiroyoshi Onnagawa (1.Faculty of Engineering, Toyama University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-3] A Water-Soluble Photolithography Process and the Application to OTFT Fabrication

Kwang Hyun Kim、Chung Kun Song (1.Dong-A Univ., Div. of Electrical & Electronics & Computer Eng.)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-7-4] Measurement of Lateral Carrier Mobility in Organic Thin Films Using Time of Flight Method

Masatoshi Kitamura、Tadahiro Imada、Satoshi Kako、Yasuhiko Arakawa (1.Research Center of Advanced Science and Technologies, University of Tokyo、2.Institute of Industrial Science, University of Tokyo)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-8-1] Electric Field Induced Second Harmonic Generation from Vacuum Evaporated Metal-Phthalocyanine Film/Metal Electrode Interface

Cheng-Quan Li、Takaaki Manaka、Mitsumasa Iwamoto (1.Department of Physical Electronics, Tokyo Institute of Technology)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-8-2] Conversion between Three and Two Dimensional Optical Waves in Attenuated Total Reflection Kretschmann Configuration with Nanostructured Langmuir-Blodgett Films

Futao Kaneko、Katsuaki Wakui、Hirotsugi Hatakeyama、Susumu Toyoshima、Kazunari Shinbo、Keizo Kato、Takahiro Kawakami、Yasuo Ohdaira、Takashi Wakamatsu (1.Niigata University, Department of Electrical and Electronic Eng.、2.Ibaraki National College of Tech., Department of Electrical Eng.)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-8-3] Low-birefringent slab waveguide fabricated with hot-embossing for sol-gel derived phenyl-methyl silsesquioxane films

Kenjiro Hasui、Masahiro Tomiki、Naomichi Okamoto (1.The Graduate School of Electronic Science and Technology, Shizuoka University、2.Permanent affiliation: Corning Technology Center, Corning Japan K. K.、3.Faculty of Engineering, Shizuoka University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード