[H-10-1] Novel Elevated Source/Drain Technology for FinFET Overcoming Agglomeration and Facet Problems Utilizing Solid Phase Epitaxy

Kiyotaka Miyano、Akio Kaneko、Ichiro Mizushima、Atsushi Yagishita、Kyoichi Suguro、Yoshihiko Saito、Kazuhiro Eguchi、Yoshitaka Tsunashima (1.Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[H-10-2] Threshold Voltage Instability of 45-nm-node Poly-Si- or FUSI-Gated SRAM Transistors Caused by Dopant Lateral Diffusion in Poly-Si

Kimihiko Hosaka、Takayuki Aoyama、Kunihiro Suzuki (1.FUJITSU LABORATORIES LTD.)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[H-10-3] Novel threshold voltage fine control method for FETs within a wafer using LDSi (Locally Differentiated Scanning ion implant)

Kyoung Bong Rouh、Min Yong Lee、Seung woo Jin、Yong Sun Sohn、Yong Soo Joung、Young Jong Ki、Il Keun Han、Yong Wook Song、sung wook Park (1.R&D Division, Hynix Semiconductor Inc.)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[H-10-4] Novel Gate-All-Around MOSFETs with Self-Aligned Structure

Jae Young Song、Woo Young Choi、Jong Pil Kim、Sang Wan Kim、Jong Duk Lee、Byung-Gook Park (1.Inter-University Semiconductor Research Center and School of Electrical Engineering, Seoul National University)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[H-10-5] Improvement of Bulk CMOS Electrostatic Integrity using Germanium and Carbon co-implantation

Benjamin Dumont、Arnaud Pouydebasque、Frederic Milesi、Kader Souifi、Frederic Boeuf、Thomas Skotnicki (1.STMicroelectronics、2.LPM - INSA de Lyon, Bat. Blaise Pascal、3.Philips Semiconductors、4.Ion Beam Services, ZI Peynier-Rousset、5.CEA-LETI)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[I-1-1] GaN quantum dots, quantum wires and quantum discs with novel optoelectronic properties

Klaus H. Ploog (1.Paul Drude Institute for Solid State Electronics)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[I-1-2] Functions and Device Applications of Quantum-sized Silicon

Nobuyoshi Koshida (1.Graduate school of Engineering, Tokyo University of Agriculture and Technology、2.2Quantum14 Co.)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[I-1-3] Uniform Self-Formation of High-Density InAs Quantum Dots by InGaAs Embedding Growth

Shin-ichi Tonomura、Mitsuaki Tomita、Koichi Yamaguchi (1.Department of Electronic Engineering, The University of Electro-Communications)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[I-1-4] Individual cathode luminescence spectroscopy of zinc oxide particles based on in situ transmission electron microscopy

Masaya Ohyama、Tokushi Kizuka (1.Institute of Materials Science, University of Tsukuba、2.Special Research Project of Nanoscience, University of Tsukuba、3.Precursory Research for Embryonic Science and Technology, JST)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[I-1-5] Facile Fabrication of Gold Nanoparticle-Titanium Oxide Alternate Assemblies by Surface Sol-Gel Process and Their Photoresponsive Properties

Taichi Arakawa、Tomoaki Kawahara、Tsuyoshi Akiyama、Sunao Yamada (1.Department of Materials Physics and Chemistry, Graduate School of Engineering, Kyushu University、2.Department of Applied Chemistry, Graduate School of Engineering, Kyushu University)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

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