The Japan Society of Applied Physics

566件中(1 - 10)

[A-1-3] High-Resolution Measurement of Ultra-Shallow Structures by Scanning Spreading Resistance Microscopy

Li Zhang、Kazuya Ohuchi、Kanna Adachi、Mitsuhiro Tomita、Kazunari Ishimaru、Mariko Takayanagi、Akira Nishiyama (1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation、2.Center For Semiconductor Research & Development, Toshiba Corporation Semiconductor Company)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

[A-1-4] Imaging of interference between incident and reflected electron waves at an InAs/GaSb heterointerface by low-temperature scanning tunneling spectroscopy

K. Suzuki、K. Kanisawa、S. Perraud、M. Ueki、K. Takashina、Y. Hirayama (1.NTT Basic Research Laboratories, NTT Corporation、2.Laboratoire de Photonique et de Nanostructures, CNRS、3.NTT Electronics Techno Corporation、4.SORST-JST、5.Graduate School of Science、6.Tohoku University)

2006 International Conference on Solid State Devices and Materials |PDF ダウンロード

566件中(1 - 10)