Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
Tue. Sep 5, 2017 1:15 PM - 5:45 PM S42 (Conf. Room 2)
Toru Yamaguchi(NTT), Jiro Yamamoto(HITACHI), Jun Taniguchi(Tokyo Univ. of Sci.)
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1:15 PM - 1:30 PM
〇Kaiki Ito1, Yuta Suzuki1, Toshiyuki horiuchi1 (1.Tokyo Denki Univ.)
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1:30 PM - 1:45 PM
〇Toru Yamaguchi1, Hirotaka Tanaka1, Nicolas Clement1, Akira Fujiwara1 (1.NTT BRL)
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1:45 PM - 2:00 PM
〇(M2)Yusuke Nakatani1, Tetsuo Harada1, Atsushi Takano2, Motoyuki Yamada1, Takeo Watanabe1 (1.Univ. of Hyogo, 2.Nagoya Univ.)
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2:00 PM - 2:15 PM
〇Tetsuo Harada1, Yusuke Nakatani1, Nobukazu Teranishi1, Takeo Watanabe1 (1.Univ. of Hyogo)
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2:30 PM - 2:45 PM
〇(M1)Shota Niihara1, Daiki Mamezaki1, Masanori Watanabe1, Tetsuo Harada1, Takeo Watanabe1 (1.Univ. of Hyogo)
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2:45 PM - 3:00 PM
〇(M2)Shunsuke Ochiai1, Tomohiro Takayama1, Yukiko Kishimura1, Hironori Asada1, Minako Iwakuma2, Manae Sonoda2, Ryoichi Hoshinno3 (1.Yamaguchi Univ., 2.NIT, Miyakonojo College, 3.FMS Inc.)
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3:00 PM - 3:15 PM
〇Hiroki Yamamoto1, Bunsho Ohtani2, Takahiro Kozawa1 (1.ISIR, Osaka Univ., 2.ICAT, Hokkaido Univ.)
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3:15 PM - 3:30 PM
〇Kohei Goto1, Taniguchi Jun1 (1.TUS)
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3:45 PM - 4:00 PM
〇Risa Goto1, Shiori Yamada1, Takumi Sannomiya1, Satoru Kaneko2, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Tech. Materials, 2.KISTEC)
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4:00 PM - 4:15 PM
〇Makoto Okada1 (1.LASTI, Univ. of Hyogo)
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4:15 PM - 4:30 PM
〇Kenta Watanabe1, Tastuya Iida1, Hiroaki Kawata1, Masaaki Yasuda1, Yoshihiko Hirai1 (1.OPU)
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4:30 PM - 4:45 PM
〇Hiroki Ueda1, Taniguchi Jun1 (1.TUS)
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5:00 PM - 5:15 PM
〇Kasumi Okabe1, Kei Kobayashi1, Masaki Mitsuyasu1, Kazuya Fukuhara1, Hirokazu Kato1, Takuya Kono1, Jung Wooyung2 (1.Toshiba Memory, 2.SK Hynix)
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5:15 PM - 5:30 PM
〇Ichiro Mano1, Jun Taniguchi1 (1.TUS)
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5:30 PM - 5:45 PM
〇Kyouhei Hashiguchi1,2, Kenta Suzuki2, Hiroshi Hiroshima2, Hiroshi Suga1 (1.CIT, 2.AIST)
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