The 81st JSAP Autumn Meeting, 2020

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-Z03-3~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Fri. Sep 11, 2020 1:30 PM - 4:15 PM Z03

Kenji Ishikawa(Nagoya Univ.), Makoto Satake(Hitachi)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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