The 68th JSAP Spring Meeting 2021

Session information

Oral presentation

8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-Z03-1~10] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Wed. Mar 17, 2021 9:00 AM - 11:45 AM Z03 (Z03)

Hisataka Hayashi(KIOXIA), Tomoko Ito(阪大)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

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