EARTHポスター発表（Poster：EARTH）

[PE1-070] Study on the Fabrication of μ-MIM Pattern Mold by UV-lithography and Electroforming Process

○Sung Cheol Park¹, Seong Ho Son¹, Ho-Nyun Lee¹, Wonsik Lee¹, Yong-Dae Kim¹, Jin Yeon Lee¹ (1. Korea Institute Industrial Technology)

キーワード：Electroforming, Ni-Fe alloy, UV-lithography, Pattern mold, µ-MIM

Micro Metal injection molding (µ-MIM) is suitable to produce complex and precision-shaped parts from a variety of materials. The molds for µ-MIM need higher hardness and dimensional accuracy. Recently, MEMS(Microelectromechanical systems) technology has been widely used in fabrication of micro molds with high aspect ratio. Electroforming process is one of the most useful fabrication techniques, which is suitable for the fabrication of complex-shaped product. In this study, the µ-MIM molds was fabricated by electroforming process of Ni-Fe alloys using lithography process. 500 µm thick sheets of SUEX were laminated on highly-doped 4-inch silicon wafers. The mandrel with width of 190 μm and spacing of 140 μm was prepared. Iron component in Ni-Fe electrodeposits was almost consistent in the range of 20%-30% with the increase of current density from 2 to 4 A/dm². The line pattern molds of Ni-Fe alloy were electroformed successfully.