The Japan Society of Applied Physics

210 results (61 - 70)

[A-8] Lithography for Future Submicron Device Fabrication

Yasuo Tarui, Joseph Borel, B. F. Griffing, Koichiro Hoh, Tadao Kato, Toyoki Kitayama, M. P. Lepselter, Junji Matsui, Makoto Nakase, Jerome P. Silverman, Kenji Gamo (1.The Tokyo University of Agriculture, 2.Thomson-EFCIS, 3.Corporate R&D Center, General Electric, 4.Electrotechnical Lab., 5.LSI R&D Center, Mitsubishi Electric Co., 6.Atsugi ECL, NTT, 7.AT and T, Bell Lab., 8.Fundamental Res. Lab. Nippon Electric Co., 9.VLSI Res. Center, Toshiba Co., 10.IBM, Yorktown Heights, 11.Osaka University)

1984 International Conference on Solid State Devices and Materials |PDF Download

210 results (61 - 70)