[S-II-5] Clean Silicon Wafer Surface by a Slight Etch Method

Ritsuo Takizawa, Toshiro Nakanishi, Kouichirou Honda, Akira Ohsawa (1.FUJITSU Laboratories LTD.)

1988 International Conference on Solid State Devices and Materials |PDF Download

[S-II-6] Chemical Structures of Ultrathin Silicon Oxide Film and Its Interface

Takeo Hattori (1.Musashi Institute of Technology)

1988 International Conference on Solid State Devices and Materials |PDF Download

Masaru TAKAKURA, Tsuyoshi OGURA, Tsukasa HAYASHI, Masataka HIROSE (1.Department of Electrical Engineering, Hiroshima University)

1988 International Conference on Solid State Devices and Materials |PDF Download

Nahomi Aoto, Eiji Ikawa, Nobuhiro Endo, Yukinori Kurogi (1.Microelectronics Research Laboratories, NEC Corporation)

1988 International Conference on Solid State Devices and Materials |PDF Download

Supriyo DATTA (1.School of Electrical Engineering Purdue University)

1988 International Conference on Solid State Devices and Materials |PDF Download

Masafumi YAMAMOTO, Kohji HOHKAWA (1.NTT LSI Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF Download

J. R. Hayes, P. England, J. P. Harbison (1.Bell Communications Research, Inc.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Makoto OKADA, Toshio OHSHIMA, Manabu MATSUDA, Naoki YOKOYAMA, Akihiro SHIBATOMI (1.Fujitsu Laboratories Limited)

1988 International Conference on Solid State Devices and Materials |PDF Download

Toshihiko MORI, Kenichi IMAMURA, Hiroaki OHNISHI, Yoshihiko MINAMI, Shunichi MUTO, Naoki YOKOYAMA (1.Fujitsu Limited)

1988 International Conference on Solid State Devices and Materials |PDF Download

Seigo Tarucha, Klaus Ploog, Fernando Miquel (1.NTT Basic Research Laboratories, 2.Max-Planck-Institut fur Festkorperforschung)

1988 International Conference on Solid State Devices and Materials |PDF Download