[C-1-6] Si on SiO2 by Solid-State Diffusion Bonding (SSDB) Technology

XU XIAO-LI, ZHAN JUAN, SHEN HUA, TONG QIN-YI (1.Microelectronics Center, Nanjing Institute of Technology)

1988 International Conference on Solid State Devices and Materials |PDF Download

[C-2-1] Silicon Oxidation Kinetics: The Formation of Thin Silicon Dioxide Films

Eugene A. Irene (1.Department of Chemistry University of North Carolina)

1988 International Conference on Solid State Devices and Materials |PDF Download

Hisashi FUKUDA, Toshiyuki IWABUCHI, Seigo OHNO (1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

M. Liehr, H. Dallaporta, J. E. Lewis, G. B. Bronner, G. W. Rubloff (1.IBM T. J. Watson Research Center)

1988 International Conference on Solid State Devices and Materials |PDF Download

Z. H. Liu, Y. C. Cheng, H. Wong (1.Department of Electrical and Electronic Engineering University of Hong Kong)

1988 International Conference on Solid State Devices and Materials |PDF Download

Naoki YASUDA, Hiroshi NAKAMURA, Kenji TANIGUCHI, Chihiro HAMAGUCHI (1.Department of Electronic Engineering, Osaka University)

1988 International Conference on Solid State Devices and Materials |PDF Download

A. Hiroki, S. Odanaka (1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

T. P. PEARSALL (1.AT&T Bell Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF Download

G. D. Shen, D. X. Xu, M. Willander, G. V. Hansson (1.Department of Physics and Measurement Technology, Linkoping University)

1988 International Conference on Solid State Devices and Materials |PDF Download

Akira YAMADA, Ying JIA, Makoto KONAGAI, Kiyoshi TAKAHASHI (1.Dept. of Electrical and Electronic Engineering, Tokyo Inst. of Technol.)

1988 International Conference on Solid State Devices and Materials |PDF Download