[LN-D-5] Control of Grain-Location in Solid-State Crystallization of Si

Hideya KUMOMI, Takao YONEHARA (1.Canon Inc.)

1990 International Conference on Solid State Devices and Materials |PDF Download

[LN-D-6] Novel Dry Cleaning Using Si3H8 with the New Single-Wafer Reactor

H. Miyata, A. Tsukune, F. Mieno, Y. Furumura, H. Tsuchikawa (1.BASIC PROCESS DEVELOPMENT DIV. ELECTRONIC DEVICES GROUP FUJITSU LTD.)

1990 International Conference on Solid State Devices and Materials |PDF Download

T. SUZUKI, H. YAMAGUCHI, S. OHZONO, N. NATSUAKI (1.Device Development Center, Hitachi, Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF Download

C. R. Viswanathan, R. Divakaruni, J. Kizziar, V. Prabhakar (1.Electrical Engineering Department UCLA)

1990 International Conference on Solid State Devices and Materials |PDF Download

C.-C. Cho, H.-Y. Liu, B. E. Gnade, C.-E. Chen (1.Central Research Laboratories, Texas Instruments Inc., 2.SGS Thomson Microelectronics)

1990 International Conference on Solid State Devices and Materials |PDF Download

N. Nishio, K. Shiotani, M. Kitakata, M. Mikoshiba (1.NEC Corporation)

1990 International Conference on Solid State Devices and Materials |PDF Download

H. Akazawa, Y. Utsumi, J. Takahashi, T. Urisu (1.NTT LSI Laboratories)

1990 International Conference on Solid State Devices and Materials |PDF Download

Han-Cheng Wulu, Nobuyoshi Kobayashi, Hidekazu Goto, Yoshio Homma (1.Central Research Laboratory, Hitachi)

1990 International Conference on Solid State Devices and Materials |PDF Download

H. Sugawara, M. Ishikawa, G. Hatakoshi (1.Research and Development Center, Toshiba Corporation)

1990 International Conference on Solid State Devices and Materials |PDF Download

T. Tanaka, A. Ooishi, T. Kajimura, S. Minagawa (1.Central Research Laboratory, Hitachi, Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF Download

310 results (291 - 300)