[Sympo.II-6] Material Optimization of Bismuth Based Mixed Layered Superlattice Ferroelectrics for High Performance FeRAMs

Masamichi AZUMA (1.Electronics Research Laboratory, Matsushita Electronics Corporation)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[Sympo.II-7] Formation of c-Axis-Oriented Bi4Ti3O12 Films with Extremely Flat Surface by Spin-Coating

Kouichi TANI、Tomomi YAMANOBE、Hideaki MATSUHASHI、Satoshi NISHIKAWA (1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[Sympo.II-8] Proposal of a Single-Transistor-Type Ferroelectric Memory Using an SOI Structure and Experimental Study on Interference Problem in Write Operation

Hiroshi ISHIWARA、Toshishige SHIMAMURA、Eisuke TOKUMITSU (1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[Sympo.II-9] Novel Porous Films Having Low Dielectric Constants Synthesized by a Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics

Nobuo Aoi (1.Semiconductor Research Center, Matsushita Electric Industrial Co. Ltd.)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[Sympo.II-10] Low Dielectric Constant Insulator by Downstream Plasma CVD at Room Temperature Using Si(CH3)4/O2

Akiko NARA、Hitoshi ITOH (1.ULSI Research Laboratories, Toshiba Corporation)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[Sympo.II-11] Effect of Bias Addition on the Gap-Filling Properties of Fluorinated Amorphous Carbon Thin Films Grown by Helicon Wave Plasma Enhanced Chemical Vapor Deposition

Kazuhiko ENDO、Toru TATSUMI (1.Microelectronics Research Laboratories, NEC Corporation)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-1] Micro Systems by Bulk Silicon Micromachining

Masayoshi ESASHI (1.Faculty of Engineering, Tohoku University)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-2] A New Three-Dimensional Multiport Memory for Shared Memory in High Performance Parallel Processor System

K. Hirano、S. Kawahito、T. Matsumoto、Y. Kudoh、S. Pidin、N. Miyakawa、H. Itani、T. Ichikizaki、H. Tsukamoto、M. Koyanagi (1.Dept. of Machine Intelligence and System Engineering, Tohoku University、2.Fuji Xerox Co.、3.Mitsubishi Heavy Industry Co.)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-3] 3D-Technology for Ultra High Density MOS Arrays

Wolfgang H. KRAUTSCHNEIDER、Andreas RUSCH、Franz HOFMANN、Frank LAU、Barbara HASLER、Armin KOHLHASE、Ulrich ZIMMERMANN、Emmerich BERTAGNOLLI (1.Siemens, Corporate Research、2.Siemens, Semiconductor Group)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-6-4] Shallow Trench Isolation for Enhancement of Data Retention Times in giga bit DRAM

B. H. Roh、C. S. Yoon、D. U. Choi、M. J. Kim、D. W. Ha、K. N. Kim、J. W. Park (1.Technology Development, Memory Device Business, Samsung Electronics, Co.)

1996 International Conference on Solid State Devices and Materials |PDF ダウンロード

298件中(271 - 280)

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