[P13-5] Fine Processing in Heat-Resistant Polymer by Electron-Beam Lithography and Thermal Development

Masahiro Tomiki、Okihiro Sugihara、Hisashi Fujimura、Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P13-6] Processing of polymer optical circuit by micromachining Silicon mold

Kenji Isogai、Okihiro Sugihara、Hisashi Fujimura、Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P13-7] High-resolution Reproduction by Cold UV Stamping in Optical Polymeric Films

Pavol Gustafik、Okihiro Sugihara (1.Shizuoka University, Graduate School of Electronic Science and Technology)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P13-8] Pentacene TFT using SiNx as Gate Insulator

Yong Xian Xu、Chung Kun Song (1.Dong-A Univ., Div. of Electrical & Electronics & Computer Eng.)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P13-9] The Structure Design of a Passive Matrix (PM) color Organic Light-Emitting Device

Shiyong Liu、Wenfa Xie (1.National Laboratory of Integrated Optoelectronics, Jinlin University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LP13-1] Syntheses of the Substituted Aluminumfluoro Phthaloyanines and their Application to NO2 Gas Sensing

Qian Xiang、Kenji Murakami、Kenzo Watanabe (1.Graduate School of Electronic Science and Technology, and Research Institute of Electronics, Shizuoka University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P14-1] Micromachining of Silicon Carbide by Silicon Lost Molding, Chemical Vapor Deposition And Reaction-Sintering

Toru Itoh、Shuji Tanaka、Jing-Feng Li、Ryuzo Watanabe、Masayoshi Esashi (1.Department of Mechatronics and Precision Engineering, Tohoku University、2.Department of Materials Processing, Tohoku University、3.New Industry Creation Hatchery Center, Tohoku University)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P14-2] Low loss and High frequency Interconnection Technology on Membrane supported by Porous Silicon Post

Ju-Hyun Ko、Young-Se Kwon (1.Department of Electrical Engineering and Computer Science, KAIST)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P14-3] Development of microarray chip by Fluidic Self-assembly method and Application to biochip

Do-Kyun Kim、Eiichi Tamiya、Young-Soo Kwon (1.Dong-A University, Interdisciplinary Graduate School of Electrical Engineering、2.School of Materials Science, Japan Advanced Institute of Science & Technology、3.Dong-A University, Department of Electrical Engineering)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

[P14-4] Improvement on power transfer efficiency of microplasma devices designed for the portable analysis system of aqueous solution

Takanori Ichiki、Toru Koidesawa、Yasuhiro Horiike (1.Bio-Nano Electronics Research Center, Tokyo University、2.Department of Materials Science, School of Engineering, The University of Tokyo)

2002 International Conference on Solid State Devices and Materials |PDF ダウンロード

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