[D-1-1] Computational MEMS Process Design and Development

Osamu Tabata (1.Department of Micro Engineering, Graduate School of Engineering, Kyoto University)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-2] Piezoresistive Rotation Angle Sensor Integrated in Micromirror

Minoru Sasaki、Motoki Tabata、Tsukasa Haga、Kazuhiro Hane (1.Tohoku University, Dept. of Nanomechanics)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-3] A CMOS Image Sensor for in vitro and in vivo Imaging of the Mouse Hippocampus

David C. Ng、Masamichi Matsuo、Takashi Tokuda、Keiichiro Kagawa、Masahiro Nunoshita、Hideki Tamura、Sadao Shiosaka、Jun Ohta (1.Nara Institute of Science and Technology、2.Graduate School of Materials Science、3.Graduate School of Biological Science)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-4] Photo-sensing Resolution of Unwired-communication Chip in Inhomogeneous RF-magnetic Field

Takehiko Hasebe、Yoshiaki Yazawa、Takashi Tase、Masao Kamahori、Kazuki Watanabe、Tadashi Oonishi (1.Hitachi, Ltd., Advanced Research Laboratory、2.Hitachi, Ltd., Central Research Laboratory)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-5] Micro-Heater Array for Tunable Fiber-Bragg Grating

Vijay Kumar Singh、Minoru Sasaki、Kazuhiro Hane、Satoshi Okude、Hideyuki Hosoya (1.Tohoku University, Dept. of Nanomechanics、2.Optics and Electronics Laboratory, Fujikura Ltd.)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-6] Thickness Effects on pH Response of HfO2 Sensing Dielectric Improved by Rapid Thermal Annealing

Chao-Sung Lai、Chia-Ming Yang、Tseng-Fu Lu (1.Department of Electronic Engineering, Chang Gung University)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-7] Resonant Silicon Mass Sensor with Capacitive Readout

Sang-Jin Kim、Takahito Ono、Masayoshi Esashi (1.Graduate School of Engineering, Tohoku University)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-1] Programmable Self-Assembly Across the Micro and Nano Scales

Karl F. Bohringer (1.University of Washington, Department of Electrical Engineering)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-2] Integrated RF-MEMS Technology with Wafer-Level Encapsulation

Kei Kuwabara、Masami Urano、Junichi Kodate、Norio Sato、Tomomi Sakata、Hiromu Ishii、Toshikazu Kamei、Kazuhisa Kudou、Masaki Yano、Katsuyuki Machida (1.NTT Microsystem Integration Laboratories, NTT Corporation、2.NTT Advanced Technology Corporation)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-3] Thinning technology for lithium niobate wafer by surface activated bonding and chemical mechanical polishing

C. C. Wu、R. H. Horng、D. S. Wuu、T. N. Chen、C. J. Ting、H.Y. Tsai、C. P. Chou (1.Department of Materials Engineering, National Chung Hsing University、2.Institute of Precision Engineering, National Chung Hsing University、3.Mechanical Industry Research Laboratories, Industrial Technology Research Institute、4.Department of Mechanical Engineering, National Chiao Tung University)

2005 International Conference on Solid State Devices and Materials |PDF ダウンロード