[C-1-1] Si-Based Infrared Light Emitters Using Semiconducting Iron Disilicide

Takashi Suemasu、Shigemitsu Murase、Yuta Ugajin、Mitsushi Suzuno (1.University of Tsukuba, Institute of Applied Physics)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-2] Electrical properties of carbon nanotubes grown at a low temperature by radical chemical vapor deposition for future LSI interconnects

Daisuke Yokoyama、Kentaro Ishimaru、Takayuki Iwasaki、Shintaro Sato、Takashi Hyakushima、Mizuhisa Nihei、Yuji Awano、Hiroshi Kawarada (1.Waseda Univ., School of Sci & Eng.、2.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.))

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-3] Carbon Nanotube Vias Fabricated by Remote Plasma-Enhanced Chemical Vapor Deposition

Masayuki Katagiri、Naoshi Sakuma、Mariko Suzuki、Tadashi Sakai、Shintaro Sato、Takashi Hyakushima、Mizuhisa Nihei、Yuji Awano (1.MIRAI-Selete (Semiconductor Leading Edge Technologies, Inc.))

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-4] A Novel Contact-plug Process with Low Resistance Nucleation Layer Using B2H6-reduction W-ALD Method for 32nm CMOS Devices and Beyond

A. Yutani、K. Ichinose、K. Maekawa、K. Asai、M. Kojima (1.Process Technology Development Div., Renesas Technology Corporation)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-1-5] Plasma-Enhanced ALD Ru Thin Films on PVD-TaN Films with Smooth Morphology at Low Temperature Using DER Ru Precursor

Kunitoshi Namba、Nobuki Hosoi、Nobuaki Tarumi、Hiroshi Shinriki、Shinichi Ogawa (1.Semiconductor Leading Edge Technologies, Inc.、2.ASM Japan K.K.)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-1] Atomically Controlled Hetero-Epitaxy of DO3-type Fe3Si on Ge(111) Substrate

Koji Ueda、Yuichiro Ando、Mamoru Kumano、Taizoh Sadoh、Kazumasa Narumi、Yoshihito Maeda、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Japan Atomic Energy Agency、3.Department of Energy Science and Technology, Kyoto University)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-2] MOVPE Condition Dependences of MnAs Nanoclusters Grown on GaInAs (111)A Surfaces

Hiroko Iguchi、Shinjiroh Hara、Junichi Motohisa、Takashi Fukui (1.Research Center for Integrated Quantum Electronics, Hokkaido University)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-3] Structure and Magnetic Properties of Gd-doped Gallium Arsenide Grown by MBE

H. Miyagawa、H. Shiraoka、S. Higuchi、K. Fujii、N. Takahashi、Y. Watanabe、K. Oda、N. Tsurumachi、S. Nakanishi、H. Itoh、S. Koshiba (1.Faculty of Engineering, Kagawa University、2.Faculty of Education, Kagawa University、3.Institute of Industrial Science, Tokyo University)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-4] Spin resolved spectroscopy of upper subbands in two-dimensional electron systems by direct transport measurements

Y. Niida、K. Takashina、A. Fujiwara、T. Fujisawa、Y. Hirayama (1.NTT Basic Research Laboratories, NTT Corporation、2.Department of physics, Tohoku University、3.SORST-JST)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-5] The Reduction of g factor at different quantum states

S. M. Huang、H. Akimoto、K. Kono、J. J. Lin、S. Tarucha、K. Ono (1.Low temperature physics laboratory, RIKEN、2.Institute of Physics, National Chiao Tung University、3.Department of Applied Physics, University of Tokyo、4.SORST-JST)

2007 International Conference on Solid State Devices and Materials |PDF ダウンロード

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