The Japan Society of Applied Physics

[H-1-04] Improvement of HRS Variability in OxRRAM by Tailored Metallic Liner

N. Guillaume1, M. Azzaz1, S. Blonkowski1,3, E. Jalaguier1, P. Gonon2, C. Vallée2, T. Blomberg4, M. Tuominen4, H. Sprey5, S. Bernasconi1, C. Charpin-Nicolle1, E. Nowak1 (1.CEA LETI (France), 2.LTM (France), 3.STMicroelectronics (France), 4.ASM Microchemistry (Netherlands), 5.ASM Belgium (Belgium))

2019 International Conference on Solid State Devices and Materials |2019年9月3日(火) 15:00 〜 15:15 |PDF ダウンロード