The Japan Society of Applied Physics

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[G-10-07] Super-conformal CVD Ruthenium with 1 Angstrom Liner in Advanced MOL Local Interconnect

〇Maryamsadat Hosseini1, Alicja Leśniewska1, Gyana Pattanaik2, Robert Clark2, Anish Dangol1, Marleen H van der Veen1, Nicolas Jourdan1, Gert Leusink2, Hunter Frost2, Cory Wajda2, Eugenio Dentoni Litta1, Naoto Horiguchi1 (1. imec (Belgium), 2. TEL (United States of America))

2022 International Conference on Solid State Devices and Materials |2022年9月29日(木) 17:45 〜 18:00 |PDF ダウンロード

419件中(281 - 290)