The Japan Society of Applied Physics

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[K-4-02] Failure Analyses and Yield Enhancement of Electroplated Cu Direct Bonding for Heterogeneous 3D and Micro-LED Integration

〇Yuki Susumago1, Tadaaki Hoshi1, Chang Liu1, Atushi Shinoda2, Hisashi Kino3, Tetsu Tanaka1,3, Takafumi Fukushima1,3 (1. Graduate School of Eng., Tohoku Univ. (Japan), 2. School of Eng., Tohoku Univ. (Japan), 3. Graduate School of Biomed. Eng., Tohoku Univ. (Japan))

2022 International Conference on Solid State Devices and Materials |2022年9月28日(水) 09:30 〜 09:45 |PDF ダウンロード

419件中(371 - 380)