[LN-D-5] Control of Grain-Location in Solid-State Crystallization of Si

Hideya KUMOMI、Takao YONEHARA (1.Canon Inc.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LN-D-6] Novel Dry Cleaning Using Si3H8 with the New Single-Wafer Reactor

H. Miyata、A. Tsukune、F. Mieno、Y. Furumura、H. Tsuchikawa (1.BASIC PROCESS DEVELOPMENT DIV. ELECTRONIC DEVICES GROUP FUJITSU LTD.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. SUZUKI、H. YAMAGUCHI、S. OHZONO、N. NATSUAKI (1.Device Development Center, Hitachi, Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

C. R. Viswanathan、R. Divakaruni、J. Kizziar、V. Prabhakar (1.Electrical Engineering Department UCLA)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

C.-C. Cho、H.-Y. Liu、B. E. Gnade、C.-E. Chen (1.Central Research Laboratories, Texas Instruments Inc.、2.SGS Thomson Microelectronics)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

N. Nishio、K. Shiotani、M. Kitakata、M. Mikoshiba (1.NEC Corporation)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Akazawa、Y. Utsumi、J. Takahashi、T. Urisu (1.NTT LSI Laboratories)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

Han-Cheng Wulu、Nobuyoshi Kobayashi、Hidekazu Goto、Yoshio Homma (1.Central Research Laboratory, Hitachi)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

H. Sugawara、M. Ishikawa、G. Hatakoshi (1.Research and Development Center, Toshiba Corporation)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. Tanaka、A. Ooishi、T. Kajimura、S. Minagawa (1.Central Research Laboratory, Hitachi, Ltd.)

1990 International Conference on Solid State Devices and Materials |PDF ダウンロード