[C-4-2] Pb Content Control in Sputtered PZT Films for FRAM Mass Production

Soichiro Ozawa、Satoru Mihara、Hideyuki Noshiro、Yoshimasa Horii、Mari Shibata、Tomohiro Takamatsu、Moritaka Nakamura、Yutaka Nishioka、Takeshi Masuda、Yusuke Miyaguchi、Noriaki Tani、Koukou Suu、Tatsuya Yamazaki (1.ULSI Engineering Division, FUJITSU LIMITED、2.Institute for Super Materials, ULVAC JAPAN, Ltd.)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-4-3] Studies on Improving Retention Time of Memorized State of MFIS Structure for Ferroelectric Gate FET Memory

Mitsue Takahashi、Hideki Sugiyama、Toshiyuki Nakaiso、Minoru Noda、Masanori Okuyama (1.Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-4-4] A Novel SPICE Model of Ferroelectric Capacitors Using Schmitt Trigger Circuit

Shuu'ichirou Yamamoto、Takumi Kato、Hiroshi Ishiwara (1.Frontier Collaborative Research Center, Tokyo Institute of Technology)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-4-5] Low-Temperature Preparation of Ferroelectric Sr2(Ta1-x, Nbx)2O7 Thin Films by Pulsed Laser Deposition and Their Application to MFIS Structure

Toshiyuki Nakaiso、Minoru Noda、Masanori Okuyama (1.Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering Science, Osaka University)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-4-6] Electrical Characteristics of Pt/SrBi2Ta2O9/Ta2O5/Si Using Ta2O5 as the Buffer Layer

Hoon Sang Choi、Kun Sang Park、Yong Tae Kim、In-Hoon Choi (1.Department of Materials Science and Engineering, Korea University、2.Semiconductor Device Lab., Korea Institute of Science and Technology)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-1] Technology Considerations for High-Speed High-Density Embedded Flash

Ko-Min Chang (1.Non-Volatile Memory Technology Center, Transportation Systems Group, Semiconductor Products Sector, Motorola)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-2] A Novel P-Channel Flash EEPROM Cell with Simple Process and Low Power Consumption

C. J. Huang、Y. C. Liu、S. F. Hong、Auter Wu、M. C. Wang、Sungmu Hsu、L. C. Hsia、Y. J. Chang、Y. T. Lo、Fu-Tai Liu (1.Technology and Process Development Division, United Microelectronics Corporation)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-3] Electrical Characterization of a Triple Self-Aligned Split-Gate Flash Cell for 0.18 μm Embedded Application

Jiang Yan、Christian Gruensfelder、Andreas Schmidt、Kisang Kim、Rebecca Mih、Jay Harrington、Kevin Houlihan、Hyun Koo Lee、Kevin Chan、Jeffrey Johnson、Bomy Chen、Connie Lo、Dana Lee、Amitay Levi、Chung Lam、Danny Shum (1.Infineon Technologies Corp.、2.IBM, Microelectronic Division、3.IBM, T. J. Watson Research Center、4.IBM, Microelectronics Division、5.Silicon Storage Technology, Inc.)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-4] A New Dual Floating Gate Flash Cell for Multilevel Operation

Jack Tai-Yuan Chen、Hongchin Lin、Shyh-Chyi Wong (1.Department of Electrical Engineering, National Chung-Hsing University、2.Taiwan Semiconductor Manufacturing Corp.)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-5] A Body Effect Assisted NOR-Type (BeNOR) Multilevel Flash Memory

Yen-Sen Wang、Hong-Ping Tsai、Evans Ching-Song Yang、Ya-Chin King、Steve Chen、Charles Ching-Hsiang Hsu (1.Microelectrics Laboratory, Semiconductor Technology Application Research (STAR) Group, Department of Electrical Engineering, National Tsing-Hua University、2.Winbond Electronics Corporation)

2000 International Conference on Solid State Devices and Materials |PDF ダウンロード