Sessions

Symposium » Nanoscale 3D analyses for new device and materials development

Symposium (Oral)

[6p-C19-1~8] Nanoscale 3D analyses for new device and materials development

Wed. Sep 6, 2017 1:45 PM - 5:30 PM C19 (C19)

Masato Koyama(TOSHIBA), Tomihiro Hashizume(Hitachi, Ltd.)

△：奨励賞エントリー
▲：英語発表
▼：奨励賞エントリーかつ英語発表
空欄：どちらもなし

+Add all to schedule

1:45 PM - 2:15 PM

[6p-C19-1] In-situ TEM investigation of nano-scale ReRAM/CBRAM devices

〇Yasuo Takahashi¹, Atsushi Tsurumaki-Fukuchi¹, Masashi Arita¹ (1.Hokkaido Univ.)

2:15 PM - 2:45 PM

[6p-C19-2] Analysis of three-dimensional micro structures using synchrotron radiation-based micro-nanotomography: examples of extraterrestrial materials.

〇Akira Tsuchiyama¹ (1.Kyoto Univ.)

2:45 PM - 3:15 PM

[6p-C19-3] Development of Local DLTS Based on Super-Higher-Order Scanning Nonlinear Dielectric Microscopy and Its Application to MOS Interface Characterization

Norimichi Chinone¹, 〇Yasuo Cho¹ (1.Tohoku Univ.)

3:15 PM - 3:45 PM

[6p-C19-4] Nano-scale analysis by combination with FIBSEM

〇Jun Kato¹, Kosuke Kimura¹, Kosuke Kurushima¹, Yumiko Shimizu¹, Takanori Naijou¹, Mitsunobu Yasuda¹ (1.TRC)

4:00 PM - 4:30 PM

[6p-C19-5] Nanostructure Analysis by Laser Assisted Atom Probe Tomography

〇Tadakatsu Ohkubo¹, Kazuhiro Hono¹ (1.NIMS)

4:30 PM - 4:45 PM

[6p-C19-6] Estimation of field strength for field-induced oxygen etching by in-situ atom probe analysis

〇Kazuki Ohtani¹, Shigekazu Nagai¹, Tatsuo Iwata¹, Koichi Hata¹ (1.Graduate school of Eng., Mie Univ.)

4:45 PM - 5:00 PM

[6p-C19-7] Development of Site-specific FIB Specimen Preparation Techniques with Positioning Precision in Sub 10nm for STEM/TEM Analysis of Nanoscale 3D Devices

〇Kei Watanabe¹, Amika Shima¹, Yutaka Fukushima¹ (1.Toshiba Nanoanalysis Corp.)

5:00 PM - 5:30 PM

[6p-C19-8] Possibility of 3D nanoscale characterization of 3D devices constructed using novel materials and structures

〇Hiroki Tanaka¹ (1.Toshiba R&D center)

×

Authentication

Password authentication.
Password is required to view the PDF. Please enter a password to authenticate.

The password has been sent to pre-registrants.
For onsite registrants, please refer to the official guidebook which will be distributed at the venue.
The password will be sent to all JSAP members in March 2018.

×

Please log in with your participant account.
» Participant Log In