Symposium (Oral)
Symposium » Current status and future prospect of atomic layer processes
Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)
Makoto Sekine(Nagoya Univ.), Takeshi Momose(Univ. of Tokyo), Daisuke Hojo(AIST), Kazuhiro Karahashi(Osaka univ.)
△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above
1:45 PM - 2:15 PM
〇Yukihiro Shimogaki1 (1.The Univ. Tokyo)
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2:15 PM - 3:00 PM
〇Hyeongtag Jeon1 (1.Hanyang Univ.)
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3:00 PM - 3:30 PM
〇Masayuki Katayama1, Tetsuya Katou1, Hiroo Anan1 (1.DENSO CORP. ARIC)
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3:30 PM - 3:45 PM
〇Takahiro Yamasaki1 (1.Osaka Univ.)
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3:45 PM - 4:00 PM
〇(DC)Hiroyuki Kuwae1, Kosuke Yamada1, Takumi Kamibayashi1, Wataru Momose2, Shuichi Shoji1, Jun Mizuno1 (1.Waseda Univ., 2.ALD Jaan)
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4:30 PM - 5:00 PM
〇Satoshi Hamaguchi1, Tomoko Ito1, Michiro Isobe1, Kazuhiro Karahashi1 (1.Osaka Univ.)
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5:00 PM - 5:30 PM
〇Peter L.G. Ventzek1 (1.Tokyo Electron America, Inc.)
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5:30 PM - 6:00 PM
〇Noriaki Toyoda1 (1.Univ. of Hyogo)
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6:00 PM - 6:15 PM
〇Takayoshi Tsutsumi1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Nobuyoshi Kobayashi2, Masaru Hori3 (1.Nagoya Univ. Eng., 2.ASM Japan K.K., 3.Nagoya Univ. Inst. Innovation for Future Society)
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6:15 PM - 6:30 PM
〇Masaki Hasegawa1, Takayoshi Tsutsumi1, Atsushi Tanide1,2, Hiroki Kondo1, Makoto Sekine1, Kenji Ishikawa1, Masaru Hori1 (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd.)
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6:30 PM - 6:45 PM
〇Tomoko Ito1, Kazuhiro Karahashi1, Satoshi Hamaguchi1 (1.Osaka Univ.)
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