1:00 PM - 1:15 PM
〇Shuichi Noda1, Hiroyuki Tanaka1, Masashi Kase1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Sep 12, 2021 1:00 PM - 4:15 PM N323 (Oral)
Hitoshi Habuka(Yokohama Natl. Univ.), Tetsuya Goto(Tohoku Univ.)
△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above
1:00 PM - 1:15 PM
〇Shuichi Noda1, Hiroyuki Tanaka1, Masashi Kase1, Yuuki Yabuta3, Naoko Yamamoto3, Ryuichiro Kamei3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.Seinan-kogyo)
1:15 PM - 1:30 PM
〇Noriko Miura1, Hiroyuki Tanaka2, Shuichi Noda2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
1:30 PM - 1:45 PM
〇Masashi Kase1, Khumpuang Sommawan1,2, Shirou Hara1,2 (1.AIST, 2.MINIMAL)
1:45 PM - 2:00 PM
〇Fumito Imura1, Kayo Kamasaki2, Shinji Iseki2, Michihiro Inoue1, Sommawan Khumpuang1,3, Shiro Hara1,3 (1.AIST, 2.Kumamotobosei, 3.MINIMAL)
2:15 PM - 2:30 PM
〇Hideyuki Watanabe1, Kazumasa Nemoto1, Fumito Imura1, Noriko Miura2, Takashi Yajima1, Shuichi Noda1, Hitoshi Umezawa1, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL)
2:30 PM - 2:45 PM
〇Hiroyuki Tanaka1, Yoshihisa Sensu2,3, Mikio Kadoi2,3, Yousuke Ohta2,3, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.MINIMAL, 3.LTJ)
2:45 PM - 3:00 PM
〇Shuhei Nakamichi1, Masashi Kase2, Kazushige Sato1, Hiroyuki Tanaka2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MinimalFab, 2.AIST)
3:00 PM - 3:15 PM
〇Fumito Imura1, Yoshihide Murashima2, Masahiro Matsuda2, Tadaaki Tsuchiya2, Kaoru Zenyouji3, Takashi Ohe3, Kouji Kosaka3, Shun-ichirou Shimbori4, Toru Hayakawa1, Sommawan Khumpuang1,5, Shiro Hara1,5 (1.AIST, 2.Logic Research, 3.TCK, 4.Sanyu, 5.MINIMAL)
3:30 PM - 3:45 PM
〇Hiroshige Kogayu1, Hiroyuki Tanaka2, Fumito Imura2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.MINIMAL, 2.AIST)
3:45 PM - 4:00 PM
〇Takashi Yajima1, Sommawan Khumpuang1,2, Hitoshi Maekawa1,2, Shinichi Ikeda1,2, Shiro hara1,2 (1.AIST, 2.MINIMAL)
4:00 PM - 4:15 PM
〇Kazumasa Nemoto1, Takashi Yajima1, Miura Noriko2, Sommawan Khumpuang1,2, Shiro Hara1,2 (1.AIST, 2.Minimal Fab)
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