[LD-7-5] Silicon Epitaxial Growth by Excited Molecular Beams of Glow-discharge-decomposed Silane

Toshiro ISU、Shigemitsu MARUNO、Hitoshi OGATA (1.Central Research Laboratory, Mitsubishi Electric Corporation)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LD-7-6] THE CHARACTERISTICS OF NITROGEN IN SILICON CRYSTALS

T. Abe、T. Masui、H. Harada (1.R&D Center, Shin-Etsu Handotai Co, Ltd.)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-1] Demagnified Projection Printing By A New X-Ray Lithographic System Using No Thin-Film Pattern Masks

Takeshi Tanaka、Hideki Matsumura (1.Department of Physical Electronics, Hiroshima University)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-2] HIGH PRECISION HALF-MICRON X-RAY MASK GENERATION BY E-BEAM LITHOGRAPHY

T. Honda、S. Hasegawa、K. Suzuki、Y. Iida (1.Microelectronics Research Laboratories, NEC Corporation)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-3] An Integrated SOS/FET Biosensor

T. Kuriyama、J. Kimura、Y. Kawana (1.NEC Corporation)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-4] Transient Analysis of Drain Current in Silicon-On-Insulator (SOI) MOSFET's

Koichi KATO、Tetsunori WADA、Kenji TANIGUCHI (1.VLSI Research Center, Toshiba Corporation)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-5] SOI / CMOS Gate Array by Laser Recrystallization

Tetsuo Izawa、Seiichiro Kawamura、Nobuo Sasaki、Motoo Nakano、Kunihiko Wada、Mitsumasa Ashida (1.IC Development Division and MOS Device Development Division Fujitsu Limited)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-6] Three-Dimensional SRAM-Cell Fabricated with a Laser-Recrystallization Technology

Nobuo Sasaki、Seiichiro Kawamura、Takashi Iwai、Motoo Nakano、Kunihiko Wada、Mikio Takagi (1.IC Development Division, Fujitsu Limited)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[LC-12-7] VLSI-Oriented Voltage Down Converter with Sub-Main Configuration

Takayasu SAKURAI、Kazuhiro SAWADA、Tetsuya IIZUKA (1.Semiconductor Device Eng. Lab., Toshiba Corp.)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-4-1FP] RECENT ADVANCES AND APPLICATIONS OF SIMS TO ELECTRONIC MATERIALS

Charles A. Evans, Jr. (1.Charles Evans & Associates)

1984 International Conference on Solid State Devices and Materials |PDF ダウンロード