[R-F] Reliability Aspects of Metallization

E. Arai、H. Ishikawa (1.Atsugi Electrical Communication Laboratories, NTT、2.Fujitsu Laboratories Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

[A-4-1] Ionized Cluster Beam Epitaxy of Single Crystalline Aluminum Films on Semiconductors and Insulators as an Approach to New Device Structures

I. Yamada、H. Usui、H. Inokawa、T. Takagi (1.Ion Beam Engineering Experimental Laboratory, Kyoto University)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

M. Muto、T. Kato、T. Ito、H. Ishikawa (1.Fujitsu Laboratories Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

T. Okamoto、K. Tsukamoto、M. Shimizu、Y. Mashiko、T. Matsukawa (1.LSI R&D Lab. Mitsubishi Electric Corp.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

Nobuyoshi NATSUAKI、Kiyonori OHYU、Tadashi SUZUKI、Nobuyoshi KOBAYASHI、Naotaka HASHIMOTO、Yasuo WADA (1.Central Research Laboratory, Hitachi Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

KATSUYUKI MACHIDA、HIDEO OIKAWA (1.NTT Atsugi Electrical Communication Laboratories)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

Yoshifumi Kawamoto (1.Central Research Laboratory, Hitachi Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

K. Nojiri、K. Tsunokuni、K. Hirobe、A. Koike、K. Ito、S. Kishino (1.Musashi Works, Hitachi, Ltd.、2.Device Development Center, Hitachi, Ltd.)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

Irchiro Mori、Toshiaki Shinozaki、Kazuyoshi Sugihara、Chikara Itoh、Mitsuo Tabata (1.VLSI Research Center, Toshiba Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード

T. Ohiwa、M. Goto、R. Yoshikawa、H. wada、T. Tojo、Y. Muraguchi (1.VLSI Research Center, Toshiba Corporation)

1985 Conference on Solid State Devices and Materials |PDF ダウンロード