[C-4-6] Characteristics of Si Epitaxial Layers Grown by a New RF-Induction Heated Hot-Wall Type Reactor for High Volume, Low Cost Epitaxy

Yohsuke Inoue、Takaya Suzuki (1.Hitachi Research Laboratory, Hitachi, Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-1] Growth of ZnS Bulk Single Crystals and Homoepitaxial Growth of ZnS by Molecular Beam Epitaxy

M. KITAGAWA、Y. TOMOMURA、A. SUZUKI、S. NAKAJIMA (1.CENTRAL RESEARCH LABORATORIES, SHARP CORPORATION)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Shigeki YAMAGA、Akihiko YOSHIKAWA、Haruo KASAI (1.Department of Electronic Engineering, Chiba University)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Shunichi HAYAMIZU、Yoshiaki ASAO、Tsunemasa TAGUCHI、Akio HIRAKI (1.Faculty of Engineering, Department of Electrical Engineering, Osaka University)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Yoshito KAWAKYU、Masahiro SASAKI、Tsutomu UEMOTO、Tatsurou BEEPU (1.R&D Center TOSHIBA Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Eiji YANOKURA、Hiroshi MIZUTA、Mitsuhiro MORI、Susumu TAKAHASHI (1.Central Research Laboratory, Hitachi, Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

T. Saito、H. Fujishiro、S. Nishi、Y. Sano、K. Kaminishi (1.Research Laboratory, Oki Electric Industry Co., Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Kunio TSUDA、Junko AKAGI、Jiro YOSHIDA (1.Toshiba Research & Development Center)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Yoshiko Someya HIRAOKA、Jiro YOSHIDA (1.Research and Development Center, Toshiba Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Mutsuhiro MORI、Tsutomu YATSUO (1.Hitachi Research Laboratory, Hitachi, Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード