[C-8-5] Stress Measurement of LOCOS Structure using Microscopic Raman Spectroscopy

K. Kobayashi、Y. Inoue、T. Nishimura、T. Nishioka、H. Arima、M. Hirayama、T. Matsukawa (1.LSI Research and Development Lab., Mitsubishi Electric Corp.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

[C-8-6] Micro Area Stress around Trench Structure

S. NADAHARA、S. KAMBAYASHI、M. WATANABE、T. NAKAKUBO (1.VLSI Research Center, Toshiba Corporation、2.Total Information System Div., Toshiba Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Shinsuke KONAKA、Yoshihito AMEMIYA、Kazuhito SAKUMA、Tetsushi SAKAI (1.NTT Electrical Communications Laboratories)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Kimihiro SASAKI、Seijiro FURUKAWA (1.Department of Applied Electronics, Graduate School of Sci. & Eng., Tokyo Inst. of Tech.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Mamoru UGAJIN、Shinsuke KONAKA、Yoshihito AMEMIYA (1.NTT Electrical Communications Laboratories)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Yasuyuki TANABE、Yoshiji KOBAYASHI、Yousuke YAMAMOTO、Tetsushi SAKAI (1.NTT Electrical Communications Laboratories)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

A. Toriumi、M. Iwase (1.VLSI Research Center, Toshiba Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

A. Toriumi、M. Iwase (1.VLSI Research Center, Toshiba Corporation)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Kazuo Yano、Masaaki Aoki、Toshiaki Masuhara (1.Central Research Laboratory, Hitachi Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード

Tsuguo INATA、Shunichi MUTO、Shigehiko SASA、Toshio FUJII、Satoshi HIYAMIZU (1.Fujitsu Laboratories Ltd.)

1987 Conference on Solid State Devices and Materials |PDF ダウンロード