[S-II-5] Clean Silicon Wafer Surface by a Slight Etch Method

Ritsuo Takizawa、Toshiro Nakanishi、Kouichirou Honda、Akira Ohsawa (1.FUJITSU Laboratories LTD.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

[S-II-6] Chemical Structures of Ultrathin Silicon Oxide Film and Its Interface

Takeo Hattori (1.Musashi Institute of Technology)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Masaru TAKAKURA、Tsuyoshi OGURA、Tsukasa HAYASHI、Masataka HIROSE (1.Department of Electrical Engineering, Hiroshima University)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Nahomi Aoto、Eiji Ikawa、Nobuhiro Endo、Yukinori Kurogi (1.Microelectronics Research Laboratories, NEC Corporation)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Supriyo DATTA (1.School of Electrical Engineering Purdue University)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Masafumi YAMAMOTO、Kohji HOHKAWA (1.NTT LSI Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

J. R. Hayes、P. England、J. P. Harbison (1.Bell Communications Research, Inc.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Makoto OKADA、Toshio OHSHIMA、Manabu MATSUDA、Naoki YOKOYAMA、Akihiro SHIBATOMI (1.Fujitsu Laboratories Limited)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Toshihiko MORI、Kenichi IMAMURA、Hiroaki OHNISHI、Yoshihiko MINAMI、Shunichi MUTO、Naoki YOKOYAMA (1.Fujitsu Limited)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Seigo Tarucha、Klaus Ploog、Fernando Miquel (1.NTT Basic Research Laboratories、2.Max-Planck-Institut fur Festkorperforschung)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード