[A-8-2] Photo-Enhanced Boron-Doping in Low-Temperature Silicon Epitaxy and Its FTIR Study

S. Watanabe, T. Yamazaki, Y. Nara, T. Ito (1.FUJITSU LABORATORIES LTD., ATSUGI)

1988 International Conference on Solid State Devices and Materials |PDF Download

[A-8-3] A New Dopant Diffusion Modeling Based on Point Defect Kinetics

Takako KASHIO, Koichi KATO (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF Download

H. Fujioka, T. Deguchi, K. Takasaki, K. Kawashima, Y. Ban (1.FUJITSU LTD.)

1988 International Conference on Solid State Devices and Materials |PDF Download

K. Ishida, T. Matsunaga, S. Miyano, A. Kameyama, N. Toyoda (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF Download

Y. Kuriyama, M. Ishibe, M. Asaka, M. Obara, S. Shimizu (1.Toshiba Research and Development Center)

1988 International Conference on Solid State Devices and Materials |PDF Download

Toshihiko HAMASAKI, Tetsunori WADA (1.ULSI Research Center, Toshiba Corporation)

1988 International Conference on Solid State Devices and Materials |PDF Download

A. Tamba, Y. Kobayashi, T. Suzuki, N. Natsuaki (1.Hitachi Research Laboratory, Hitachi Ltd., 2.Central Research Laboratory, Hitachi Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Tadashi SAITOH, Masao KONDO, Tsuyoshi UEMATSU, Masao TAMURA (1.Central Research Laboratory, Hitachi, Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

W. Josquin, D. de Lang, M. van Iersel, J. van Dijk, A. van de Goor, E. Bladt (1.Philips Research Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF Download

Eronides F. da Silva, Jr., Yasushiro Nishioka, T. -P. Ma (1.Universidade Federal de Pernambuco Departamento de Fisica, 2.Cidade Universitaria)

1988 International Conference on Solid State Devices and Materials |PDF Download