[A-5-1] Microcharacterization and Novel Device Applications of Semiconductor-Metal Eutectic Composites

B. M. DITCHEK, B. G. YACOBI (1.GTE Laboratories Incorporated)

1988 International Conference on Solid State Devices and Materials |PDF Download

[A-5-2] A High Integrity and Low Resistance Ti-Polycide Gate Using a Nitrotgen Ion Implanted Buffer Layer

K. Kobushi, S. Okada, S. Kameyama, K. Tsuji (1.Basic Research Laboratory, Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Nobuyoshi Kobayashi, Masayuki Suzuki, Masayoshi Saitou (1.Central Research Laboratory, Hitachi Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Hideaki Matsuhashi, Satosi Nishikawa, Seigo Ohno (1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Yasuhisa Omura, Hiroshi Inokawa, Katsutoshi Izumi (1.NTT LSI Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF Download

Tadashi SUZUKI, Masao TAMURA, Kiyonori OHYU, Nobuyoshi NATSUAKI (1.Central Research Laboratory, Hitachi, Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Yoshiko NIKI, Soichi NADAHARA, Masaharu WATANABE (1.ULSI Research Center, Toshiba Co.)

1988 International Conference on Solid State Devices and Materials |PDF Download

T. IZAWA, M. KASE, H. MORI, K. KOBAYASHI, M. NAKANO (1.Advanced Tech. Division and Process Development Division, FUJITSU LTD.)

1988 International Conference on Solid State Devices and Materials |PDF Download

Akihisa YOSHIDA, Masatoshi KITAGAWA, Kentaro SETSUNE, Takashi HIRAO (1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF Download

H. Tomita, M. Negishi, T. Sameshima, H. Hayashi, S. Usui (1.Sony Research Center and, 2.Sony Semiconductor Group R. and D. Department)

1988 International Conference on Solid State Devices and Materials |PDF Download