[C-1-6] Si on SiO2 by Solid-State Diffusion Bonding (SSDB) Technology

XU XIAO-LI、ZHAN JUAN、SHEN HUA、TONG QIN-YI (1.Microelectronics Center, Nanjing Institute of Technology)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-2-1] Silicon Oxidation Kinetics: The Formation of Thin Silicon Dioxide Films

Eugene A. Irene (1.Department of Chemistry University of North Carolina)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Hisashi FUKUDA、Toshiyuki IWABUCHI、Seigo OHNO (1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

M. Liehr、H. Dallaporta、J. E. Lewis、G. B. Bronner、G. W. Rubloff (1.IBM T. J. Watson Research Center)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Z. H. Liu、Y. C. Cheng、H. Wong (1.Department of Electrical and Electronic Engineering University of Hong Kong)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Naoki YASUDA、Hiroshi NAKAMURA、Kenji TANIGUCHI、Chihiro HAMAGUCHI (1.Department of Electronic Engineering, Osaka University)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

A. Hiroki、S. Odanaka (1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

T. P. PEARSALL (1.AT&T Bell Laboratories)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

G. D. Shen、D. X. Xu、M. Willander、G. V. Hansson (1.Department of Physics and Measurement Technology, Linkoping University)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード

Akira YAMADA、Ying JIA、Makoto KONAGAI、Kiyoshi TAKAHASHI (1.Dept. of Electrical and Electronic Engineering, Tokyo Inst. of Technol.)

1988 International Conference on Solid State Devices and Materials |PDF ダウンロード