[PC-1-5] The Oxide Reliability Improvement with Ultra-Dry Unloading in Wet Oxidation Using Load Lock Oxidation System

Jiro Yugami、Makoto Ohkura (1.Central Research Laboratory, Hitachi, Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-1-6] Effect of Organic Compounds on Gate Oxide Reliability

Yoshimi SHIRAMIZU、Hiroshi KITAJIMA (1.ULSI Device Development Laboratories, NEC Corporation)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-1-7] Correlating Charge-to-Breakdown with Constant-Current Injection to Gate Oxide Lifetime under Constant-Voltage Stress

Koji ERIGUCHI、Yukiharu URAOKA (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.、2.Liquid Crystal Display Development Center, Matsushita Electric Ind. Co., Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-1-8] Trap Generation Induced by Local Distortion in Amorphous Silicon Dioxide Film

Chioko KANETA (1.Fujitsu Laboratories Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-1-9] Dynamics of Hot-Carrier Induced Interface State Generation in Polysilicon Thin-Film Transistors

A. PECORA、I. POLICICCHIO、G. FORTUNATO F. PLAIS、D. PRIBAT (1.IESS-CNR、2.THOMSON-CSF, LCR)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-1-10] Magnetic Field Induced Prolonged Changes of Electric Parameters of MOS Structures

Vladimir M. Maslovsky、Jury O. Lichmanov、Nickolai S. Samsonov、Elena V. Simanovich (1.Zelenograd Research Institute of Physical Problems)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-2-1] Electrical Characterizations of Pt/(Ba,Sr)TiO3/Pt Planar Capacitors for ULSI DRAM Applications

Soon Oh Park、Cheol Seong Hwang、Hag-Ju Cho、Chang Seok Kang、Ho-Kyu Kang、Sang In Lee、Moon Yong Lee (1.SAMSUNG Electronics Co., Semiconductor R&D Center, Memory Process Developement Team 2)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-2-2] Quasi-Epitaxial Growth of PZT Thin Film to Fabricate Capacitor Suitable for 256Mb DRAM and Beyond

Satoshi YAMAUCHI、Masaki YOSHIMARU (1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-2-3] Substrate Orientation Dependence of the Properties of Metal-Ferroelectric BaMgF4-Silicon Capacitors by Post-Deposition Annealing

Kwang-Ho Kim、Je-Deok Kim、Hiroshi Ishiwara (1.Department of Semiconductor Engineering, Cheong-Ju University、2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[PC-2-4] Bi4Ti3O12 Films Grown on SiO2/Si at Low Temperature by Laser Ablation Method

Wenbiao WU、Keigo FUMOTO、Yoshihiro OISHI、Masanori OKUYAMA、Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

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