[B-6-3] Analysis of Structure-Dependent Hot Carrier Effect in Various LDD MOSFET's Using an Efficient Interface State Profiling Method

J.-J. Yang、Steve S. Chung、P.-C. Chou、J.-R. Shih、C.-H. Chen、M.-S. Lin (1.Department of Electronic Engineering, National Chiao Tung University、2.Taiwan Semiconductor Manufacturing Co.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-6-4] Analysis of Mechanisms for Hot-Carrier-Induced VLSI Circuit Degradation

Yoonjong Huh、Dooyoung Yang、Sungwook Kim、Yungkwon Sung (1.ULSI Laboratory, LG Semicon, Co., Ltd.、2.Korea University, Electrical Engineering Dept.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-1] Large 1/f Noise in Polysilicon TFT Loads and Its Effects on the Stability of SRAM Cells

Masaaki Aoki、Takashi Hashimoto、Toshiaki Yamanaka、Takahiro Nagano (1.Central Research Laboratory, Hitachi, Ltd.、2.Semiconductor and Integrated Circuits Division, Hitachi, Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-2] A Novel Technique for Investigating Hot-Electron-Induced Oxide Damages and Device Degradations in Submicron LDD n-MOSFET's

G.-H. Lee、Steve S. Chung (1.Department of Electronic Engineering and Institute of Electronics National Chiao Tung University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-3] Lateral Carrier Profile Measurement under Quarter-Micron MOS Devices Using Chemical Etch/AFM Method

H. Hasegawa、N. Kodama、J. Hayashi、S. Saito (1.ULSI Device Development Labs., NEC Corporation)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[B-7-4] Statistical Performance-Instability Due to Three-Dimensional Nonuniformity of Dopant Atoms in a System of Many MOSFETs

Tomohisa Mizuno (1.ULSI Research Laboratories, TOSHIBA Corporation)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-1] Direct Observation of Working Vacuum Tunnel Junctions Using a Transmission Electron Microscope

Mark LUTWYCHE、Yasuo WADA (1.Advanced Research Laboratory, Hitachi, Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-2] High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips

Tohru NAMBA、Akihito UEHARA、Takeshi DOI、Takahiko NAGATA、Yasuhide KURODA、Seiichi MIYAZAKI、Kentaro SHIBAHARA、Shin YOKOYAMA、Atsushi IWATA、Masataka HIROSE (1.Research Center for Integrated Systems, Hiroshima University、2.Department of Electrical Engineering, Hiroshima University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-3] Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods

Satoshi Koyanagi、Masamichi Akazawa、Hideki Hasegawa (1.Research Center for Interface Quantum Electronics and Department of Electrical Engineering Hokkaido University)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-5-4] X-Ray Reflectometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment

Yoshihiro SUGITA、Naoki AWAJI、Satoshi OHKUBO、Satoru WATANABE、Satoshi KOMIYA、Takashi ITO (1.Fujitsu Laboratories Ltd.)

1995 International Conference on Solid State Devices and Materials |PDF ダウンロード

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