SIMOX Technology

Takakuni Douseki、Fumiharu Morisawa、Shunji Nakata、Yusuke Ohtomo (1.NTT Telecommunications Energy Laboratories、2.NTT Electronics Corporation)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-1] Scenario of Source/Drain Extension and Halo Engineering for High Performance 50 nm SOI-pMOSFET

Naoto Horiguchi、Yukio Tagawa、Tomonari Yamamoto、Manabu Kojima、Toshihiro Sugii (1.Fujitsu Laboratories Ltd.)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-2] Ultra-High Selectivity Sidewall-Spacer Etching and Contact Hole Etching Technologies for 0.1 μm FD-SOI Devices

Naokatsu Ikegami、Hideaki Matsuhashi、Jun Kanamori (1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-3] A Highly Reliable 0.18 μm SOI CMOS Technology for 3.3V/1.8V Operation Using Hybrid Trench Isolation and Dual Gate Oxide

S. Maeda、K. Shiga、H. Naruoka、N. Hattori、T. Iwamatsu、T. Matsumoto、Y. Hirano、Y. Yamaguchi、T. Ipposhi、S. Maegawa、M. Inuishi (1.ULSI Development Center, Mitsubishi Electric Corporation)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-4] Impact of Hot Carrier Stress on Low-Frequency Noise Characteristics in Floating-Body SOI MOSFETs

Toshiaki Tsuchiya、Toshiyuki Yoshida、Yasuhiro Sato (1.Interdisciplinary Faculty of Science and Engineering, Shimane University、2.NTT Telecommunications Energy Laboratories)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-5] RF Noise Characteristics of SOI MOSFET's

A. O. Adan、M. Fukumi、S. Shitara (1.IC Development Group, SHARP Corp.)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-6] Anomalous Noise Degradation Caused by Device Size Effects in SOI MOSFETs

Hyeokjae Lee、Kwun-Soo Chun、Jong Ho Lee、Young June Park、Hong Shick Min (1.School of Electrical Engineering and Computer Science, Seoul National University、2.School of Electrical Engineering, Wonkwang University)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[C-6-7] Conduction Mechanisms for Off-State Leakage Current of Schottky Barrier Thin-Film Transistors (SBTFT)

Kuan-Lin Yeh、Horng-Chih Lin、Rou-Gu Huang、Ren-Wei Tsai、Tiao-Yuan Huang (1.Institute of Electronics, National Chiao Tung University、2.National Nano Device Laboratories)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-3-1] Advanced Sensing Circuit and Sensor Structure for a High-Sensitive Capacitive Fingerprint Sensor LSI

H. Morimura、S. Shigematsu、T. Shimamura、N. Sato、K. Machida、H. Kyuragi (1.NTT Lifestyle and Environmental Technology Laboratories、2.NTT Telecommunications Energy Laboratories)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-3-2] Wide Dynamic Range Photo Detector for Smart Position Sensor Using Log-Response and Correlation Circuit

Yusuke Oike、Makoto Ikeda、Kunihiro Asada (1.Department of Electronics Engineering, University of Tokyo、2.VLSI Design and Education Center (VDEC), University of Tokyo)

2001 International Conference on Solid State Devices and Materials |PDF ダウンロード

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