[D-10-1] Molecular Dynamic Simulation on the Crystallization of HfO2, Hf-aluminate, and Hf-silicate

Yuko Kosaka, Takahiro Yamasaki, Chioko Kaneta (1.Fujitsu Laboratories Limited)

2003 International Conference on Solid State Devices and Materials |PDF Download

[D-10-2] Theoretical Analysis of Oxygen Diffusion in monoclinic HfO2

Minoru Ikeda, Georg Kresse, Toshihide Nabatame, Akira Toriumi (1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET), 2.Institut fur Materialphysik, Univeisitat Wien, 3.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technologies (AIST), 4.Department of Materials Science School of Engineering, University of Tokyo)

2003 International Conference on Solid State Devices and Materials |PDF Download

[D-10-3] Etching yields of HfO2 under Ar+ and CFX+ (X = 1, 2, 3) ion beam irradiation

Kazuhiro Karahashi, Nobuhisa Yamagishi, Tsuyoshi Horikawa, Akira Toriumi (1.MIRAI Project Association of Super -Advanced Electronics Technologies (ASET), 2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Deparatment of Materials Science School of Engineering, University of Tokyo)

2003 International Conference on Solid State Devices and Materials |PDF Download

[D-10-4] Selective Dry Etching of HfO2 in CF4, Cl2 and HBr Based Chemistry

Takeshi Maeda, Hiroyuki Ito, Riichiro Mitsuhashi, Atsushi Horiuchi, Takaaki Kawahara, Akiyoshi Muto, Takaoki Sasaki, Kazuyoshi Torii, Hiroshi Kitajima (1.Semiconductor Leading Edge Technologies, Inc.)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-1] Electronic and photonic devices via one-dimensional stacking of quantum structures

Lars Samuelson (1.Lund University, Solid State Physics/the Nanometer Consortium)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-2] Formation of 1μm-period GaAs Kagome Lattice Structure by Selective Area Metalorganic Vapor Phase Epitaxy

Premila Mohan, Junichi Motohisa, Takashi Fukui (1.Research Center for Integrated Quantum Electronics (RCIQE), Hokkaido University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-3] Selective MBE Growth of GaAs Hexagonal Nano-wire Networks on (111)B Patterned Substrates

Souichi Yoshida, Isao Tamai, Taketomo Sato, Hideki Hasegawa (1.Research Center for Integrated Quantum Electronics (RCIQE) and Graduate School of Electronics and Information Engineering, Hokkaido University.)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-4] Migration-Induced Ge Dot Formation

Shuya Kaechi, Daisuke Kitayama, Yoshiyuki Suda (1.Faculty of Technology, Tokyo University of Agriculture and Technology)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-5] Demonstration of MEMS-Controlled Electronic States in Single Quantum Dots

T. Nakaoka, T. Kakitsuka, T. Saito, Y. Arakawa (1.RCAST, IIS, and CCR, University of Tokyo, 2.NTT Photonics Laboratories, NTT Corporation)

2003 International Conference on Solid State Devices and Materials |PDF Download

[E-1-6] Displacement Sensing using Quantum Mechanical Interference

Hiroshi Yamaguchi, Sen Miyashita, Yoshiro Hirayama (1.NTT Basic Research Laboratories, 2.NTT Advanced Technology, 3.CREST-JST)

2003 International Conference on Solid State Devices and Materials |PDF Download