The Japan Society of Applied Physics

463 results (361 - 370)

[P4-6] Influence of structural variation of Ni silicide thin films on electrical property for contact materials

Kazuya Okubo, Yoshinori Tsuchiya, Osamu Nakatsuka, Akira Sakai, Shigeaki Zaima, Yukio Yasuda (1.Graduate School of Engineering, Nagoya University, 2.Center for Integrated Research in Science and Engineering, Nagoya University, 3.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P4-7] Ultra-shallow Boron Profile Fitting Compensating for Surface Contamination by Utilizing Genetic Algorithms

Masahiro Murakawa, Kentaro Shibahara, Yoshinori Oda, Tetsuya Higuchi, Kenji Nishi (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.Research Center for Nanodevices and Systems, Hiroshima University, 3.Semiconductor Leading Edge Technologies, Inc. (Selete), 4.Kinki Univ. Tech. College)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P4-9] Atomic-scale Adsorbent Structure of Contaminant Metal on Si(100) Surface and its Effect on Thermal Oxidation

Takashi Onizawa, Tetsuya Narushima, Kazushi Miki, Kikuo Yamabe (1.Nanotechnology Research Institute (NRI), National Institute of Advanced Industrial Science and Technology (AIST), 2.Institute of Applied Physics, University of Tsukuba, 3.Nanomaterials Laboratory (NML), National Institute for Materials Science (NIMS), 4.SFI Trinity Nanoscience Laboratory, Trinity College Dublin)

2003 International Conference on Solid State Devices and Materials |PDF Download

[P4-13] Wet Etching Characteristics of both As-deposited and Annealed Al2O3 and HfAlOx Films

Tomoaki Nishimura, Ronald Kuse, Koji Tominaga, Toshihide Nabatame, Akira Toriumi (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.MIRAI Project, Association of Super-Advanced Electronics Technology (ASET), 3.Department of Materials Science, School of Engineering, The University of Tokyo)

2003 International Conference on Solid State Devices and Materials |PDF Download

463 results (361 - 370)