The Japan Society of Applied Physics

[J-9-3] New Functional Device Characteristics with 2-Dimensional Array of Si Nanodisks Fabricated by Combination of Bio-Template and Ultimate Top-down Etching

M. Igarashi1、C. H. Huang1、M. Tomura1、M. Takeguchi2、S. Horita3、Y. Uraoka4、T. Fuyuki4、I. Yamashita4,5、T. Morie6、S. Samukawa1 (1.Tohoku Univ.(Japan)、2.NIMS(Japan)、3.JAIST(Japan)、4.NAIST(Japan)、5.Panasonic Corp.(Japan)、6.Kyushu Inst. of Tech.(Japan))

2009 International Conference on Solid State Devices and Materials |PDF ダウンロード