The Japan Society of Applied Physics

415 results (111 - 120)

[D-2-05] Improvement of Contacts on Etched p-type GaN by Low-bias ICP–RIE

〇Takeru Kumabe1, Yuto Ando1, Hirotaka Watanabe2, Yoshio Honda2, Manato Deki1,3, Atsushi Tanaka2,4, Shugo Nitta2, Hiroshi Amano2,3,4,5 (1. Grad. Sch. of Eng. Nagoya Univ.(Japan), 2. IMaSS Nagoya Univ.(Japan), 3. VBL Nagoya Univ.(Japan), 4. NIMS(Japan), 5. ARC Nagoya Univ.(Japan))

2020 International Conference on Solid State Devices and Materials |Mon. Sep 28, 2020 5:15 PM - 5:30 PM |PDF Download

415 results (111 - 120)