[E-3-02] Contiguous Plasma-Enhanced ALD for High-Performance Zinc Oxide TFTs

〇Ben Daniel Rowlinson¹, Jiale Zeng¹, Vasilieos Mourgelas¹, Christian Patzig², Lutz Berthold², Joshua Daniel Akrofi¹, Martin Ebert¹, Harold Chong¹ (1. Univ. of Southampton (UK), 2. Fraunhofer Inst. IMWS (Germany))

2022 International Conference on Solid State Devices and Materials |Tue. Sep 27, 2022 4:45 PM - 5:00 PM |PDF Download

[E-3-03] [No Show] High Performance Ta-Doped β-Ga₂O₃ MISFET with h-BN Dielectric and Its Carrier Scattering Mechanisms

〇Xiao-Xi Li¹, Yu Sun², Yu-Chun Li¹, Rui Zhang², Chang-Tai Xia³, Ying-Guo Yang¹, Hong-Liang Lu¹ (1. Fudan Univ. (China), 2. Zhejiang Univ. (China), 3. Shanghai Inst. of Opt./Fine Mech., CAS (China))

2022 International Conference on Solid State Devices and Materials |Tue. Sep 27, 2022 5:00 PM - 5:15 PM |PDF Download

[E-3-04] Structural Relaxation of Rare-Metal-Free Oxide Semiconductors for Control of Bias Stress-Induced Instability in Solution-Processed Transistors

〇Yu-Jin Hwang¹, Do-Kyung Kim¹, Sang-Hwa Jeon¹, Ziyuan Wang¹, Sin-Hyung Lee^1,2, In-Man Kang^1,2, Jaewan Jang^1,2, Jin-Hyuk Bae^1,2 (1. Eng of Electronic and electrical, Univ. of Kyungpook (Korea), 2. Eng of Electronics, Univ. of Kyungpook (Korea))

2022 International Conference on Solid State Devices and Materials |Tue. Sep 27, 2022 5:15 PM - 5:30 PM |PDF Download

[E-3-05] Atomic Layer Deposited Ultra-Thin Indium Zinc Oxide Channel Thin Film Transistor

Yan-Kui Liang¹, 〇Wei-Li Lee¹, Jing-Wei Lin¹, Sih-Rong Wu¹, Tsung-Ying Yang¹, Li-Chi Peng¹, Tsung-Te Chou², Chi-Chung Kei², Edward-Yi Chang¹, Chun-Hsiung Lin¹ (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwan Instrument Research Institute, National Applied Research Laboratories (Taiwan))

2022 International Conference on Solid State Devices and Materials |Tue. Sep 27, 2022 5:30 PM - 5:45 PM |PDF Download

[E-3-06] Utilizing Dual-stacked IGZO channel structure to Achieve Optical Memories Application

〇Kuan-Ju Zhou¹, Ting-Chang Chang¹, Simon M. Sze², Ya-Ting Chien¹, Po-Yu Yen¹ (1. National Sun Yat-Sen University (Taiwan), 2. University of National Yang Ming Chiao Tung (Taiwan))

2022 International Conference on Solid State Devices and Materials |Tue. Sep 27, 2022 5:45 PM - 6:00 PM |PDF Download

[E-4-01 (Invited)] Atomic-layer-deposited atomically thin In2O3 channel for BEOL logic and memory applications

〇Peide D. Ye¹ (1. Purdue Univ. (United States of America))

2022 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2022 9:00 AM - 9:30 AM |PDF Download

[E-4-02 (Invited)] Opportunity of Monolithic 3D Compute-in-Memory Technology

Yuan-Chun Luo¹, 〇Shimeng Yu¹ (1. Georgia Inst. of Tech. (United States of America))

2022 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2022 9:30 AM - 10:00 AM |PDF Download

[E-4-03] Optimum Composition Ratio of CAAC-IGZO

〇Toshiki Hamada¹, Yuichi Sato¹, Motomu Kurata¹, Naoki Okuno¹, Hitoshi Kunitake¹, Shunpei Yamazaki¹ (1. Semiconductor Energy Laboratory Co., Ltd. (Japan))

2022 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2022 10:00 AM - 10:15 AM |PDF Download

[E-4-04] Nanoscale Trench-Gate Self-Aligned C-Axis Aligned Crystalline Indium-Gallium-Zinc Oxide Field-Effect Transistor using Cap Layer

〇MASAHIRO WAKUDA¹, Motomu Kurata¹, Satoru Saito¹, Shunichi Ito¹, Ryo Arasawa¹, Shinya Sasagawa¹, Kentaro Sugaya¹, Yoshikazu Hiura¹, Hidekazu Miyairi¹, Yuji Egi¹, Ryota Hodo¹, Hitoshi Kunitake¹, Shunpei Yamazaki¹ (1. Semiconductor Energy Laboratory Co., Ltd. (Japan))

2022 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2022 10:15 AM - 10:30 AM |PDF Download

[E-4-05] 3D monolithic CAAC-IGZO/Si hybrid CMOS ring oscillator and 64 multiple states high efficient (>200TOPS/W) for Analog Memory Computing

〇Min-Cheng Chen¹, Satoru Ohshita², Hidefumi Rikimaru², Yoshiyuki Kurokawa², Satoshi Watanabe², Yuki Imoto², Yoshinori Ando², Shang-Shiug Chuang¹, Hiroshi Yoshida¹, Ming-Han Liao³, Shou-Zen Chang¹, Shunpei Yamazaki² (1. Powerchip Semiconductor Manufacturing Corp. (Taiwan), 2. Semiconductor Energy Laboratory Co., Ltd. (Japan), 3. National Taiwan University (Taiwan))

2022 International Conference on Solid State Devices and Materials |Wed. Sep 28, 2022 10:45 AM - 11:00 AM |PDF Download