[F-3-03] Impact of the dielectric layer on Wake-up Effect of HZO-based Thin Films

^○Min Liao¹, Junshuai Chai¹, Jinjuan Xiang², Kai Han³, Yanrong Wang⁴, Hao Xu¹, Xiaolei Wang¹, Jing Zhang⁴, Wenwu Wang¹ (1. Institute of Microelectronics Chinese Academy of Sciences (China), 2. Beijing Superstring Academy of Memory Tech. (China), 3. Weifang Univ. (China), 4. North China Univ.of Tech. (China))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 9:30 AM - 9:45 AM |PDF Download

[F-3-04] Improved Anti-fatigue and Fatigue Recovery Capability of the HfO ₂-ZrO ₂ Ferroelectric Capacitors with Superlattice Structure

^○Mingshuang Kang¹, Yue Peng¹, Wenwu Xiao², Yan Liu¹, Genquan Han^1,3, Yue Hao¹ (1. Wide Bandgap Semiconductor Technology Disciplines State Key Laboratory, School of Microelectronics, Xidian University (China), 2. Xi'an UniIC Semiconductors Company Ltd. (China), 3. Hangzhou Institute of Technology, Xidian University, Hangzhou (China))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 9:45 AM - 10:00 AM |PDF Download

[F-4-01] On-Wafer 3D E-beam Detector Cube by FinFET CMOS Technologies

Yi-Han Huang¹, Kuan-Chung Chiu¹, ^○Yu-Jie Teng¹, Burn Jeng Lin¹, Jiaw-Ren Shih², Faith Yuh², Yue-Der Chih², Jonathan Chang², Chrong Jung Lin¹, Ya-Chin King¹ (1. Inst. of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. Taiwan Semiconductor Manufac. Company (Taiwan))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 10:45 AM - 11:00 AM |PDF Download

[F-4-02] New module and sensor optic design to reduce petal flare in CMOS image sensor

^○Hye Yeon Park¹, Sang-In Bae¹, Yunki Lee¹, Tao Feng², Tong Cheng², Peide Li², Wei Zhang², Baotan Jiang², Jinmyoung Mok¹, Younggyu Jeong¹, Kyoungyong Choi¹, Bumsuk Kim¹, Jungchak Ahn¹ (1. Samsung Electronics (Korea), 2. vivo Communication Technology Co. Ltd (China))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 11:00 AM - 11:15 AM |PDF Download

[F-4-03] Experimental observation of negative differential resistance in GeSn/GeSiSn double barrier structure toward resonant tunneling diode applications

^○Shuto Ishimoto¹, Mitsuo Sakashita¹, Masashi Kurosawa¹, Osamu Nakatsuka¹, Shigehisa Shibayama¹ (1. Nagoya Univ. (Japan))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 11:15 AM - 11:30 AM |PDF Download

[F-4-04] Integrate-and-Fire Operation with Signal Amplification by using “Dual-Gate PN-Body Tied SOI-FET”

^○Haruki Yonezaki¹, Takayuki Mori¹, Jiro Ida¹ (1. Kanazawa Inst. of Tech. (Japan))

2023 International Conference on Solid State Devices and Materials |Thu. Sep 7, 2023 11:30 AM - 11:45 AM |PDF Download

[F-5-01 (Invited)] Low Temperature Selective Growth of Group-IV Source / Drain Epilayers for Advanced Contact Applications

^○Clement Porret¹, Andriy Y. Hikavyy¹, Erik Rosseel¹, Pierre Eyben¹, Gerardo T. Martinez¹, Jean-Luc Everaert¹, Gianluca Rengo^1,2,3, Bert Pollefliet^1,2, Yosuke Shimura¹, Robert Langer¹, Naoto Horiguchi¹, Roger Loo¹ (1. imec (Belgium), 2. FWO (Belgium), 3. KU Leuven (Belgium))

2023 International Conference on Solid State Devices and Materials |Fri. Sep 8, 2023 9:00 AM - 9:30 AM |PDF Download

[F-5-02] Crystallinity and Composition of Sc / Si:P System for Advanced Contact Applications

^○Bert Pollefliet^1,2, Clement Porret², Jean-Luc Everaert², Kiroubanand Sankaran², Xiaoyu Piao², Erik Rosseel², Thierry Conard², Andrea Impagnatiello², Yosuke Shimura², Andriy Hikavyy², Roger Loo², André Vantomme¹, Clement Merckling^1,2 (1. KU Leuven (Belgium), 2. imec (Belgium))

2023 International Conference on Solid State Devices and Materials |Fri. Sep 8, 2023 9:30 AM - 9:45 AM |PDF Download

[F-5-03] Epitaxial SiGe/Si Multi-Stacks for CFET Devices

^○Roger Loo¹, Yosuke Shimura¹, Anjani Akula¹, Clement Porret¹, Alex Merkulov¹, Mustafa Ayyad¹, Han Han¹, Olivier Richard¹, Andrea Impagnatiello¹, Andriy Hikavyy¹ (1. Imec (Belgium))

2023 International Conference on Solid State Devices and Materials |Fri. Sep 8, 2023 9:45 AM - 10:00 AM |PDF Download

[F-5-04] Compressively Strained Epitaxial Ge Layers for Quantum Computing Applications

^○Yosuke Shimura¹, Clement Godfrin¹, Andriy Hikavyy¹, Roy Li¹, Juan Aguilera Servin², Georgios Katsaros², Paola Favia¹, Danny Wan¹, Kristiaan De Greve¹, Roger Loo¹ (1. imec (Belgium), 2. IST Austria (Austria))

2023 International Conference on Solid State Devices and Materials |Fri. Sep 8, 2023 10:00 AM - 10:15 AM |PDF Download