Poster Session

[H2-PV23] Slot 23

2021年12月14日(火) 18:30 〜 20:00 H2-PV23 (online)

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18:30 〜 20:00

[H2-PV23-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda², Yusuke Hibino¹ (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))

18:30 〜 20:00

[H2-PV23-02] Effects of Y Doping on Properties of InN Films Deposited by Glancing-angle Reactive Evaporation

Mizuki Ide¹, *Kazuya Murata¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:00

[H2-PV23-03] Effects of Deposition Pressure on Electrochromic Properties of WO₃ Films Sputtered with Glancing-angle Deposition Scheme

Yuji Horikoshi¹, *Hiroki Tano¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:00

[H2-PV23-04] Improvement of Al-doped Zinc Oxide Thin Film Deposition Conditions by Sputtering Method Using Powder Target

*Tamiko Ohshima^1,4, Yusuke Hibino¹, Takeshi Ihara¹, Yoshihito Yagyu¹, Hiroharu Kawasaki¹, Yoshiaki Suda², Takahiko Satake³, Shin-ichi Aoqui³, Naho Itagaki⁴, Kazunori Koga⁴, Masaharu Shiratani⁴ (1. NIT Sasebo College (Japan), 2. NIT Ishikawa College (Japan), 3. Sojo Univ. (Japan), 4. Kyushu Univ. (Japan))

18:30 〜 20:00

[H2-PV23-05] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique

*Feiyu Chen¹, Kunihiro Kamataki¹, Yang Tao¹, Sakyo Okunaga¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu University (Japan), 2. NINS (Japan))

18:30 〜 20:00

[H2-PV23-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH₄ multi-hollow plasma chemical vapor deposition

*Sung-Hwa Hwang¹, Shinjiro Ono¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Tatsuyuki Nakatani³, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Nat'l Inst. of Nat. Sci. (Japan), 3. Okayama Univ. (Japan))

18:30 〜 20:00

[H2-PV23-07] Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma

*Toma Sato¹, Sakyo Okunaga¹, Kunihiro Kamataki¹, Kentaro Tomita², Pan Yiming¹, Daisuke Yamashita¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Hokkaido Univ. (Japan), 3. NINS (Japan))

18:30 〜 20:00

[H2-PV23-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

*Kohei Abe¹, Akihiro Yamamoto¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunihiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Graduate School of Information Science and Electrical Engineering, Kyushu University. (Japan), 2. National Institutes of Natural Sciences (Japan))

18:30 〜 20:00

[H2-PV23-09] Bactericidal mechanism of Rhizobium radiobacter in L-tryptophan solution exposed to oxygen radicals

*Masafumi Ito¹, Naoyuki Iwata², Masaru Hori² (1. Meijo Univ. (Japan), 2. Nagoya Univ. (Japan))

18:30 〜 20:00

[H2-PV23-10] Application Of Non-Thermal Plasma For Removing Metal Ions From Water

*Sayma Khanom¹, Nobuya Hayashi¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:00

[H2-PV23-11] Relationship of NH Radicals Produced by Pulsed-Arc Plasma and Efficiency of Steel Nitriding

*Ryuta Ichiki¹, Kento Kojima¹, Noritake Yagawa¹, Kosuke Tachibana¹, Takashi Furuki¹, Seiji Kanazawa¹ (1. Oita Univ. (Japan))

18:30 〜 20:00

[H2-PV23-12] High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device

*Kazuya Yamaguchi¹, Kensuke Sasai², Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1. Department of Electronics, Nagoya Univ. (Japan), 2. cLPS, Nagoya Univ. (Japan), 3. National Institute for Fusion Science (Japan))

18:30 〜 20:00

[H2-PV23-13] Possible plasma oxidation effect on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2): A computational study

*Kazunori Koga^1,2, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Masaharu Shiratani¹, Pankaj Attri¹ (1. Kyushu Univ. (Japan), 2. NINS (Japan))

18:30 〜 20:00

[H2-PV23-14] Kinetic study of effects of discharge power on CO₂ methanation using a plasma catalyst

*Taiki Hasegawa¹, Masashi Ideguchi¹, Daisuke Yamashita¹, Susumu Toko², Kunihiro Kamataki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Osaka Univ. (Japan), 3. NINS (Japan))

18:30 〜 20:00

[H2-PV23-15] In-situ and direct measurement of plasma light emission by color sensor in plasma reactor

*Keiji Sakurai¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1. Univ. Shiga Pref (Japan))

18:30 〜 20:00

[H2-PV23-16] Fabrication of Au-ZnO nanocomposite film for solar photocatalysis using micro-plasma jet operated in open air

*Yoshiki Shimizu¹ (1. National Inst. of Advanced Indus. Sci. and Tech. (AIST) (Japan))

18:30 〜 20:00

[H2-PV23-17] Structural Analysis of Hydrogenated Amorphous Carbon Films Deposited by Capacitively Coupled Plasma Chemical Vapor Deposition

*Shinjiro Ono¹, Sung Hwa Hwang¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Jun Seok Oh³, Susumu Takabayashi⁴, Tatsuyuki Nakatani⁵, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. National Institutes of Natural Sciences (Japan), 3. Osaka City Univ. (Japan), 4. National Institute of Technology, Ariake College (Japan), 5. Okayama University of Science (Japan))

18:30 〜 20:00

[H2-PV23-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

*Yang Tao¹, Daiki Nagamatsu¹, Kunihiro Kamataki¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. NINS. (Japan))

18:30 〜 20:00

[H2-PV23-19] Calibration of force acting on an optically trapped particle in Ar plasma

*Sakyo Okunaga¹, Toma Sato¹, Kunihiro Kamataki¹, Kentaro Tomita², Pan Yiming¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Hokkaido Univ. (Japan), 3. National Institutes of Natural Sci. (Japan))

18:30 〜 20:00

[H2-PV23-20] Analysis of Amorphous carbon film deposition process with FTIR

*Tatsuo Nakai¹, Atsuya Kuwada¹, Ryo Sasamoto¹, Masanori Shinohara¹ (1. Fukuoka University (Japan))

18:30 〜 20:00

[H2-PV23-21] Size and density control of Fe catalyst particles by interval sputtering method for the growth control of CNT forests

*Hirofumi Koji^1,2, Hiroshi Furuta¹, Akimitsu Hatta¹ (1. Kochi Univ. Tech. (Japan), 2. National Inst. Tech., Kitakyushu College (Japan))

18:30 〜 20:00

[H2-PV23-22] Improvement of Energy Cost in Methanation of CO₂ with Plasma Catalysis

*Susumu Toko¹, Masashi Ideguchi², Taiki Hasegawa², Kunihiro Kamataki², Kosuke Takenaka¹, Kazunori Koga², Masaharu Shiratani², Yuichi Setsuhara¹ (1. Osaka Univ. (Japan), 2. Kyushu Univ. (Japan))

18:30 〜 20:00

[H2-PV23-23] Graphene Growth using Microwave-Excited Atmospheric Pressure Plasma

*Yusuke Sakai¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1. Meijo Univ. (Japan))

18:30 〜 20:00

[H2-PV23-24] Simultaneous synthesis and deposition by utilizing micro-plasma-bubbles

*Yu Yamashita¹, Shinya Sakuma¹, Yu Yamashita¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:00

[H2-PV23-25] Fabrication of High-Quality Zinc Oxide Thin Film by Pulsed Laser Deposition

*Sana Tasaki¹, Tamiko Ohshima¹, Hiroharu Kawasaki¹, Yusuke Hibino¹, Takeshi Ihara¹, Yoshihito Yagyu¹ (1. National Institute of Technology, Sasebo College (Japan))

18:30 〜 20:00

[H2-PV23-26] Effect of rf bias on the film property of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition

*Akihiro Yamamoto¹, Kohei Abe¹, Iori Nagao¹, Michihiro Otaka¹, Daisuke Yamashita¹, Kunishiro Kamataki¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. Info. sci. and Electrical Engineering (Japan), 2. National Inst. of Natural Sci. (Japan))

18:30 〜 20:00

[H2-PV23-27] AlN Thin Film Properties Improved by Pressure Gradient Sputtering

*Ken Yonezawa¹, Tatsuyuki Nakatani², Jun Seok Oh ³, Kazunori Koga⁴, Masaharu Shiratani⁴ (1. Kenix Corp. (Japan), 2. Okayama Univ. of Sci. (Japan), 3. Osaka City Univ. (Japan), 4. Kyusyu Univ. (Japan))

18:30 〜 20:00

[H2-PV23-28] Plasma generation for water purification using cavitation bubble in water

*Satoshi Ihara¹ (1. Saga university (Japan))

Oral Session

[H2-O7] Slot 07

2021年12月15日(水) 14:30 〜 18:00 Room A (G401)

Chair: Takamasa Okumura, Takeru Okada

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14:30 〜 14:50

[H2-O7-01 (Symposium Invited)] The Deposition of Dense Ceramic Coatings With Fine Solid Particles By a Non-Equilibrium Transient Plasma Jet

*Kentaro Shinoda¹, Mohammed Shahien¹, Jun Akedo¹ (1. Nat'l. Inst. Adv. Indus. Sci. Tech. (AIST) (Japan))

14:50 〜 15:10

[H2-O7-02 (Symposium Invited)] Phase-selectively disordered rutile-only or anatase phase-only in the phase-mixed P25 TiO₂ for visible-light photocatalyst

*Hyoyoung Lee^1,2 (1. Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science (IBS), Sungkyunkwan Univ., Suwon, 16419, Republic of Korea (Korea), 2. Department of Chemistry, Sungkyunkwan Univ., Suwon, 16419, Republic of Korea (Korea))

15:10 〜 15:25

[H2-O7-03] Formation mechanism of amorphous Li₄GeO₄ nanoparticles by induction thermal plasma

*Yiran Wang¹, Xiaoyu Zhang¹, Byeong-Il Min¹, Manabu Tanaka¹, Takayuki Watanabe¹ (1. Kyushu Univ. (Japan))

15:25 〜 15:40

[H2-O7-04] Effects of pulse rf discharge on carbon dioxide methanation in plasma catalytic method

*Masashi Ideguchi¹, Taiki Hasegawa¹, Daisuke Yamashita¹, Susumu Toko², Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. Osaka Univ. (Japan), 3. NINS (Japan))

15:40 〜 15:55

[H2-O7-05] Planar Thermal Plasma Jet for Silicon Surface Treatment

*Manabu Tanaka¹, Takafumi Okuma¹, Takayuki Watanabe¹, Tsugio Matsuura² (1. Kyushu Univ. (Japan), 2. Tasoarc Corp. (Japan))

15:55 〜 16:10

[H2-O7-06] Nanostructured Ge films by high-pressure plasma sputtering for high-capacity Li ion battery anodes

*Giichiro Uchida¹, Kenta Nagai¹, Junki Hayashi¹, Yuma Habu¹ (1. Meijo Univ. (Japan))

Break （16:10 〜 16:20）

16:20 〜 16:35

[H2-O7-07] Microplasma-Enabled Colloidal Nitrogen-Doped Graphene Quantum Dots for Broad-Range Fluorescent pH Sensors

*Darwin Kurniawan¹, Wei-Hung Chiang¹ (1. National Taiwan University of Science and Technology (Taiwan))

16:35 〜 16:50

[H2-O7-08] Three-dimensional structural analysis of carbon nanowalls synthesized by a radical-injection plasma-enhanced chemical vapor deposition system

*Hiroki Kondo¹, Atsushi Ozaki¹, Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹, Uroš Cvelbar², Mineo Hiramatsu³ (1. Nagoya University (Japan), 2. Jozef Stefan Institute (Slovenia), 3. Meijo University (Japan))

16:50 〜 17:05

[H2-O7-09] Biomimetic Diamond-like Carbon Coating on a Lumen of Small-diameter Long-sized Tube Functionalized by Oxygen Plasma Treatment

*Yuichi Imai¹, Tatsuyuki Nakatani², Kazuhiro Kanda³, Shinsuke Kunitsugu⁴, Yasuhiro Fujii⁵, Daiki Ousaka⁵, Susumu Ouzawa⁵, Tomio Uchi¹ (1. STRAWB Inc. (Japan), 2. Okayama Univ. of Science (Japan), 3. Univ. of Hyogo (Japan), 4. Industrial Technology Center of Okayama Pref. (Japan), 5. Okayama Univ. (Japan))

17:05 〜 17:20

[H2-O7-10] Microplasma-Reinforced Fabrication of Crosslinked Nitrogen-Doped Graphene Quantum Dots Sponges for Water Environmental Applications

*Darwin Kurniawan¹, Wei-Hung Chiang¹ (1. National Taiwan University of Science and Technology (Taiwan))

17:20 〜 17:40

[H2-O7-11 (Symposium Invited)] Plasma and Vacuum fabrication of multifunctional 3D nanoarchitectures: applications in nanosensors, energy harvesting, wetting and icing

Javier Castillo-Seoane², Xabier Garcia-Casas¹, Laura Montes-Montañez¹, Nicolas Filippin, Francisco Aparicio¹, Ali Ghaffarinejad¹, Lidia Contreras-Bernal¹, Jorge Gil-Rostra¹, Jorge Budagoski¹, Victor Lopez-Flores¹, Carmen Lopez-Santos¹, juan Sánchez-Valencia¹, *Ana BORRAS¹ (1. CSIC, Spanish National Research Council (Spain), 2. US, University of Seville (Spain))

17:40 〜 18:00

[H2-O7-12 (Symposium Invited)] The influence of the treated surface on non-thermal atmospheric pressure plasma

*Ana Sobota¹, Harry Philpott¹, Olivier JAP van Rooij¹, Elmar T Slikboer^1,2,3, Marlous Hofmans^1,2, Pedro Viegas^2,4, Olivier Guaitella², Anne Bourdon² (1. Eindhoven University of Technology (Netherlands), 2. Ecole Polytechnique (France), 3. University of Liverpool (UK), 4. Masaryk University (Czech Republic))

Oral Session

[H2-O8] Slot 08

2021年12月16日(木) 09:00 〜 12:00 Room E (G416+417)

Chair: Kenji Ishikawa

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09:00 〜 09:30

[H2-O8-01 (Symposium Keynote)] Silicon-based Thin Film Structures for Photonic Applications

*Peter Mascher¹ (1. McMaster University (Canada))

09:30 〜 09:50

[H2-O8-02 (Symposium Invited)] Bonding state selective doping of graphene and its application

*Takeru Okada¹ (1. Tohoku Univ. (Japan))

09:50 〜 10:10

[H2-O8-03 (Symposium Invited)] Plasma CVD Synthesis of Graphene Nanoribbon Quantum Dot

*Toshiaki Kato¹, Toshiro Kaneko¹ (1. Tohoku Univ. (Japan))

10:10 〜 10:30

[H2-O8-04 (Symposium Invited)] Machine Learning Technologies and Semiconductor Materials

*Masaaki Matsukuma¹ (1. Tokyo Electron Technology Solutions Ltd. (Japan))

Break （10:30 〜 10:40）

10:40 〜 11:00

[H2-O8-05 (Symposium Invited)] Development of New Oxynitride Semiconductors with Tunable Band Gaps Using Magnetron Sputtering

*Naho Itagaki¹ (1. Kyushu Univ. (Japan))

11:00 〜 11:15

[H2-O8-06] Optical transmission of carbon nanowalls from ultra-violet region to infra-red region

*Shintaro Iba¹, Hiroki Kondo¹, Kenji Ishikawa¹, Takayoshi Tsutsumi¹, Makoto Sekine¹, Masaru Hori¹, Mineo Hiramatsu² (1. Nagoya Univ. (Japan), 2. Meijo Univ. (Japan))

11:15 〜 11:30

[H2-O8-07] Conductive carbon film deposition by microwave plasma with high voltage biasing

Ikumi Hamaguchi¹, *Hansin Bae¹, Kensuke Sasai², Haruka Suzuki^1,2, Hirotaka Toyoda^1,2,3 (1. Department of Electronics, Nagoya Univ. (Japan), 2. cLPS, Nagoya Univ. (Japan), 3. National Institute for Fusion Science (Japan))

11:30 〜 11:45

[H2-O8-08] Influence of Timing of Alternating Gas Injection on Temperature Field in Reaction Chamber for Nanoparticle Synthesis using Pulse Modulated Induction Thermal Plasmas

*Yasunori Tanaka¹, Keita Akashi¹, Ryudai Furukawa¹, Yurina Nagase¹, Yusuke Nakano¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Keitaro Nakamura² (1. Kanazawa Univ. (Japan), 2. Nisshin Seifun Groupe Inc. (Japan))

11:45 〜 12:00

[H2-O8-09] Schottky Barrier Engineering between the Single-Layer WS₂ and ITO Electrodes for High-Performance Transparent Solar Cells

*Xing He¹, Toshiro Kaneko¹, Toshiaki Kato¹ (1. Tohoku Univ. (Japan))

Oral Session

[H2-O10] Slot 10

2021年12月16日(木) 16:00 〜 18:00 Room E (G416+417)

Chair: Giichiro Uchida

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16:00 〜 16:30

[H2-O10-01 (Symposium Keynote)] Functional nitrogen science for plasma-processing in life and matter

*Kenji Ishikawa¹, Toshio Kaneko², Masaru Hori¹ (1. Nagoya Univ. (Japan), 2. Tohoku Univ. (Japan))

16:30 〜 16:45

[H2-O10-02] Green route for ammonium nitrate synthesis: Fertilizer for plant growth enhancement

*Pankaj Attri¹, Kazunori Koga^1,2, Takamasa Okumura¹, Nozomi Takeuchi³, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. National Inst. of Natural Science (Japan), 3. Tokyo Inst. of Tech. (Japan))

16:45 〜 17:00

[H2-O10-03] Effect of intraseed moisture and plasma irradiation on lettuce seed surface

*Takamasa Okumura¹, Teruki Anan¹, Hayate Tanaka¹, Daisuke Yamashita¹, Pankaj Attri¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹, Yushi Ishibashi¹, Yoshifumi Fujimoto³, Masato Kumauchi³, Hidetaka Matsui⁴ (1. Kyushu University (Japan), 2. National Institutes of Natural Sciences (Japan), 3. Sanshin Metal Working (Japan), 4. Shinkouseiki (Japan))

17:00 〜 17:15

[H2-O10-04] Synthesis of Silver Nanoparticles/Poly(N-Isopropylacrylamide) Composite with Pulsed Arc Discharge in Contact with Water Interface.

*Cinthya Soreli Castro Issasi¹, Mitsuru Sasaki^2,3, Rodolfo Morales Ibarra⁴ (1. Graduate School of Sci. and Tech., Kumamoto Univ. (Japan), 2. Inst. of Indus. Nanomaterials (IINa), Kumamoto Univ. (Japan), 3. Faculty of Advanced Sci. and Tech., Kumamoto Univ. (Japan), 4. Faculty of Mechanical and Electrical Engineering, Univ. Autonoma de Nuevo Leon (Mexico))

17:15 〜 17:30

[H2-O10-05] Three dimensional porous Au/Ag nanostrutures Microplasma-Engineered Nanoassemblies on cellulose for Surface-enhanced Raman scattering properties

*Yi-Jui Yeh¹ (1. National Taiwan Univ. (Taiwan))

17:30 〜 17:45

[H2-O10-06] N₂/SiH₄ flow rate ratio dependence of nanoparticle incorporation in SiN_x films deposited by plasma CVD

*Masaharu Shiratani¹, Yusuke Sasaki¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga¹ (1. Kyushu Univ. (Japan))

17:45 〜 18:00

[H2-O10-07] Investigation of 2D electric field measurements in Ar plasmas using a fine particle trapped with laser tweezers

*Kunihiro KAMATAKI¹, Sakyo Okunaga¹, Toma Sato¹, Kentaro Tomita², Pan Yimin¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,3, Masaharu Shiratani¹ (1. Kyushu University (Japan), 2. Hokkaido University (Japan), 3. NINS (Japan))

Poster Session

[H2-PR18] Slot 18

2021年12月16日(木) 18:30 〜 20:30 H2-PR18 (G403-404)

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18:30 〜 20:30

[H2-PR18-01] Preparation of elemental gradient functional thin films by using mixture powder targets

*Hiroharu Kawasaki¹, Tamiko Ohshima¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda², Yusuke Hibino¹ (1. Nat. Ins. Tech., Sasebo Col. (Japan), 2. Nat. Ins. Tech., Ishikawa Col. (Japan))

18:30 〜 20:30

[H2-PR18-02] Effects of Y Doping on Properties of InN Films Deposited by Glancing-angle Reactive Evaporation

Mizuki Ide¹, *Kazuya Murata¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:30

[H2-PR18-03] Effects of Deposition Pressure on Electrochromic Properties of WO₃ Films Sputtered with Glancing-angle Deposition Scheme

Yuji Horikoshi¹, *Hiroki Tano¹, Yasushi Inoue¹, Osamu Takai² (1. Chiba Inst. of Tech. (Japan), 2. Kanto Gakuin Univ. (Japan))

18:30 〜 20:30

[H2-PR18-04] Improvement of Al-doped Zinc Oxide Thin Film Deposition Conditions by Sputtering Method Using Powder Target

18:30 〜 20:30

[H2-PR18-05] Developing Prediction of Key Process Parameters of Plasma CVD for Fabricating a-Si:H Solar Cells through Boosting Technique

18:30 〜 20:30

[H2-PR18-06] Structural analysis of carbon nanoparticle composite films prepared by Ar+CH₄ multi-hollow plasma chemical vapor deposition

18:30 〜 20:30

[H2-PR18-07] Study of Position Fluctuation of a Fine Particle Trapped with Laser Tweezers in Ar Plasma

18:30 〜 20:30

[H2-PR18-08] Ion Energy Distribution Function in DC Pulse biased Capacitively Coupled Plasma Discharge by using Particle-In-Cell/Monte Carlo Collision Model

18:30 〜 20:30

[H2-PR18-09] Bactericidal mechanism of Rhizobium radiobacter in L-tryptophan solution exposed to oxygen radicals

*Masafumi Ito¹, Naoyuki Iwata², Masaru Hori² (1. Meijo Univ. (Japan), 2. Nagoya Univ. (Japan))

18:30 〜 20:30

[H2-PR18-10] Application Of Non-Thermal Plasma For Removing Metal Ions From Water

*Sayma Khanom¹, Nobuya Hayashi¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-11] Relationship of NH Radicals Produced by Pulsed-Arc Plasma and Efficiency of Steel Nitriding

*Ryuta Ichiki¹, Kento Kojima¹, Noritake Yagawa¹, Kosuke Tachibana¹, Takashi Furuki¹, Seiji Kanazawa¹ (1. Oita Univ. (Japan))

18:30 〜 20:30

[H2-PR18-12] High-performance Ag nanoparticle production by novel liquid-flow plasma treatment device

18:30 〜 20:30

[H2-PR18-13] Possible plasma oxidation effect on the binding of C-terminal Domain of SARS-CoV-2 Spike Protein with Human Angiotensin-Converting Enzyme 2 (hACE2): A computational study

*Kazunori Koga^1,2, Takamasa Okumura¹, Kunihiro Kamataki¹, Naho Itagaki¹, Masaharu Shiratani¹, Pankaj Attri¹ (1. Kyushu Univ. (Japan), 2. NINS (Japan))

18:30 〜 20:30

[H2-PR18-14] Kinetic study of effects of discharge power on CO₂ methanation using a plasma catalyst

18:30 〜 20:30

[H2-PR18-15] In-situ and direct measurement of plasma light emission by color sensor in plasma reactor

*Keiji Sakurai¹, Shigeyuki Miyagi¹, Osamu Sakai¹ (1. Univ. Shiga Pref (Japan))

18:30 〜 20:30

[H2-PR18-16] Fabrication of Au-ZnO nanocomposite film for solar photocatalysis using micro-plasma jet operated in open air

*Yoshiki Shimizu¹ (1. National Inst. of Advanced Indus. Sci. and Tech. (AIST) (Japan))

18:30 〜 20:30

[H2-PR18-17] Structural Analysis of Hydrogenated Amorphous Carbon Films Deposited by Capacitively Coupled Plasma Chemical Vapor Deposition

18:30 〜 20:30

[H2-PR18-18] Measurements of Radial and Vertical Electric Field in Capacitively Coupled Plasma

*Yang Tao¹, Daiki Nagamatsu¹, Kunihiro Kamataki¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga^1,2, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan), 2. NINS. (Japan))

18:30 〜 20:30

[H2-PR18-19] Calibration of force acting on an optically trapped particle in Ar plasma

18:30 〜 20:30

[H2-PR18-20] Analysis of Amorphous carbon film deposition process with FTIR

*Tatsuo Nakai¹, Atsuya Kuwada¹, Ryo Sasamoto¹, Masanori Shinohara¹ (1. Fukuoka University (Japan))

18:30 〜 20:30

[H2-PR18-21] Size and density control of Fe catalyst particles by interval sputtering method for the growth control of CNT forests

*Hirofumi Koji^1,2, Hiroshi Furuta¹, Akimitsu Hatta¹ (1. Kochi Univ. Tech. (Japan), 2. National Inst. Tech., Kitakyushu College (Japan))

18:30 〜 20:30

[H2-PR18-22] Improvement of Energy Cost in Methanation of CO₂ with Plasma Catalysis

18:30 〜 20:30

[H2-PR18-23] Graphene Growth using Microwave-Excited Atmospheric Pressure Plasma

*Yusuke Sakai¹, Keigo Takeda¹, Mineo Hiramatsu¹ (1. Meijo Univ. (Japan))

18:30 〜 20:30

[H2-PR18-24] Simultaneous synthesis and deposition by utilizing micro-plasma-bubbles

*Yu Yamashita¹, Shinya Sakuma¹, Yu Yamashita¹ (1. Kyushu Univ. (Japan))

18:30 〜 20:30

[H2-PR18-25] Fabrication of High-Quality Zinc Oxide Thin Film by Pulsed Laser Deposition

*Sana Tasaki¹, Tamiko Ohshima¹, Hiroharu Kawasaki¹, Yusuke Hibino¹, Takeshi Ihara¹, Yoshihito Yagyu¹ (1. National Institute of Technology, Sasebo College (Japan))

18:30 〜 20:30

[H2-PR18-26] Effect of rf bias on the film property of amorphous silicon oxide films deposited by plasma enhanced chemical vapor deposition

18:30 〜 20:30

[H2-PR18-27] AlN Thin Film Properties Improved by Pressure Gradient Sputtering

18:30 〜 20:30

[H2-PR18-28] Plasma generation for water purification using cavitation bubble in water

*Satoshi Ihara¹ (1. Saga university (Japan))

セッション一覧

H. Innovative Materials Processing for Sustainable Society » [H-2] Plasma-Based Synthesis, Processing and Characterization of Materials for Energy and Environment

[H2-PV23] Slot 23

[H2-O7] Slot 07

[H2-O8] Slot 08

[H2-O10] Slot 10

[H2-PR18] Slot 18

認証