Oral presentation

[18a-Z14-1~11] 7.1 X-ray technologies

Thu. Mar 18, 2021 9:00 AM - 12:15 PM Z14 (Z14)

Akira Sasaki(QST), Mitsunori Toyoda(Tokyo Polytechnic Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

△ [18a-Z14-1] Surface deterioration control in protective film of collector mirror for EUV light source

〇Yoshiyuki Honda¹, Shinji Nagai¹, Masayuki Morita¹, Masahiko Andou¹, Akifumi Matsuda², Mamoru Yoshimoto² (1.Gigaphoton Inc., 2.Tokyo Tech.)

9:15 AM - 9:30 AM

▲ [18a-Z14-2] Cleaning of tin layer on EUV multilayer mirrors by the EUV induced hydrogen plasma

〇Nozomi Tanaka¹, Baojun Zhu¹, Chang Liu¹, Katsunobu Nishihara¹, Shinsuke Fujioka¹, Kyung Sik Kang², Youngduk Suh², Jeong-Gil Kim², Ken Ozawa³, Minoru Kubo³ (1.ILE Osaka Univ., 2.Samsung MRD Center, 3.Samsung R&D Inst.)

9:30 AM - 9:45 AM

▼ [18a-Z14-3] Optical Emission Spectroscopy (OES) measurement of EUV-induced plasma parameters in hydrogen

〇(D)CHANG LIU¹, NOZOMI TANAKA¹, BAOJUN ZHU¹, KATSUNOBU NISHIHARA¹, SHINSUKE FUJIOKA¹, KYUNGSIK KANG², YOUNGDUK SUH², JEONGGIL KIM², KEN OZAWA³, MINORU KUBO³ (1.Osaka Univ., 2.Samsung MRD Center, 3.Samsung R&D Inst.)

9:45 AM - 10:00 AM

▲ [18a-Z14-4] Two-photon laser-induced fluorescence of hydrogen atom in EUV photoionized plasma

〇(P)Baojun Zhu¹, Chang Liu¹, Nozomi Tanaka¹, Katsunobu Nishihara¹, Shinsuke Fujioka¹, Kyung Sik Kang², Youngduk Suh², Jeong-Gil Kim², Ken Ozawa³, Minoru Kubo³ (1.ILE, Osaka Univ., 2.MRD, Samsung, 3.Samsung R&D Inst.)

10:00 AM - 10:15 AM

[18a-Z14-5] The origin of the EUV spectrum of Sn and heavier and elements, which is applicable to the lithographic sources

〇Akira Sasaki¹ (1.KPSI, QST)

10:30 AM - 11:00 AM

[18a-Z14-6] [The 22nd Optics and Quantum Electronics Achievement Award Speech] Pioneering study on phase measurement and X-ray phase imaging by Talbot interferometry

〇Atsushi Momose¹, Wataru Yashiro¹, Shunsuke Yokozeki² (1.Tohoku Univ., 2.Kyushu Inst. Tech.)

11:00 AM - 11:15 AM

[18a-Z14-7] Backscattering X-ray Imging by using Caustic Network Aperture

〇Takayoshi Shimura¹, Mikoto Munemori¹, Takuji Hosoi¹, Heiji Watanabe¹ (1.Osaka Univ.)

11:15 AM - 11:30 AM

[18a-Z14-8] High Energy X-ray Phase Imaging Using Talbot-Lau Interferometer with Structured Anode X-ray Source

〇Kenji Kimura¹, Mengran Sun¹, Ryosuke Ueda², Haojie Pan¹, Atsushi Momose² (1.Tohoku Univ., 2.IMRAM Tohoku Univ.)

11:30 AM - 11:45 AM

[18a-Z14-9] Discrimination between Natural and Artificial Products by X-ray Phase Imaging

〇Kenji Kimura¹, Atsushi Momose² (1.Tohoku Univ., 2.IMRAM Tohoku Univ.)

11:45 AM - 12:00 PM

[18a-Z14-10] Laboratory-Based Pixel Super-Resolution X-ray Phase Imaging System With Triangular Phase Gratings

〇Katsumasa Ikematsu¹, Atsushi Momose¹, Hidekazu Takano¹, Ryosuke Ueda¹, Koh Hashimoto¹, Zhuoxuan Zhao¹, Hiroki Kawakami², Pouria Zangi³, Martin Boerner³, Otto Markus⁴, Joachim Schulz⁴ (1.IMRAM Tohoku Univ., 2.Hamamatsu Photonics, 3.Karlsruhe Inst. of Technology, 4.microworks)

12:00 PM - 12:15 PM

[18a-Z14-11] Development of small size X-ray CCD system for space application

〇Junko Hiraga¹, Yukino Urabe¹, Naoki Kamada¹, Kousuke Maeda¹, Hiroshi Nakajima² (1.Kwansei Gakuin Univ., 2.Kanto Gakuin Univ.)

Oral presentation

[18p-Z14-1~4] 7.1 X-ray technologies

Thu. Mar 18, 2021 1:15 PM - 2:15 PM Z14 (Z14)

Toshihide Tsuru(Yamagata Univ.)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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1:15 PM - 1:30 PM

▼ [18p-Z14-1] Study on X-Ray Phase Imaging Microscope with a Lau Interferometer Having a π Phase Grating

〇Mingjian Cai¹, Hidekazu Takano², Tetsuo Samoto², Atsushi Momose² (1.Tohoku Univ, 2.Tohoku IMRAM Inst)

1:30 PM - 1:45 PM

[18p-Z14-2] Fabrication and evaluation of a soft X-ray laminar-type diffraction grating of 3200 lines/mm groove density

〇Tadashi Hatano^1,2, Masato Koike^3,4, Alexander S. Pirozhkov³, Tsubasa Kakio⁵, Nobukazu Hayashi⁵, Hiroyuki Sasai⁵, Tetsuya Nagano⁵, Masami Terauchi² (1.SRIS, Tohoku Univ., 2.IMRAM, Tohoku Univ., 3.QuBS, QST, 4.Eng., Osaka City Univ., 5.Device Dept., Shimadzu Corp.)

1:45 PM - 2:00 PM

[18p-Z14-3] Global Optimization Technique of
Two-Glazing-Incidence-Mirror Objective for Soft-X-ray Focusing Applications (5)

〇(M2)Shota Yamashita¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

2:00 PM - 2:15 PM

[18p-Z14-4] Development of soft X-ray microscope with a Wolter mirror at Photon Factory BL11D

〇Norio Watanabe¹, Sadao Aoki^2,1 (1.Univ. Tsukuba, 2.CROSS)

Sessions

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies