[D-1-1] The Effect of Boron and Fluorine Incorporation in SiON Gate Insulator on NBTI

Takaoki Sasaki、Fumio Ootsuka、Hiroji Ozaki、Mitsuhiro Tomikawa、Mitsuo Yasuhira、Tsunetoshi Arikado (1.Semiconductor Leading Edge Technologies Inc.)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-2] New insights into dynamic negative bias temperature instability of pMOSFETs

Shyue Seng Tan、Tu Pei Chen、Chew Hoe Ang、W. Y. Teo、Lap Chan (1.School of Electrical & Electronic Engineering, Nanyang Technological University、2.Technology Development Department, Chartered Semiconductor Manufacturing Limited)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-3] Neighboring effect in nitrogen-enhanced negative bias temperature instability

Shyue Seng Tan、Tu Pei Chen、Jia Mei Soon、Kian Ping Loh、C. H. Ang、W. Y. Teo、Lap Chan (1.School of Electrical & Electronic Engineering, Nanyang Technological University、2.Department of Chemistry, National University of Singapore、3.Technology Development Department, Chartered Semiconductor Manufacturing Limited)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-4] Conductive Atomic Force Microscopy Analysis for Local Electrical Characteristics in Stressed SiO2 Gate Films

Yukihiko Watanabe、Akiyoshi Seko、Hiroki Kondo、Akira Sakai、Shigeaki Zaima、Yukio Yasuda (1.Toyota Central R&D Labs., Inc、2.Department of Crystalline Materials Science, Graduate School of Engineering, Nagoya University、3.Center for Cooperative Research in Advanced Science and Technology, Nagoya University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-5] Measurement of extension structures in deep sub-micron MOSFETs by scanning capacitance microscopy based on frequency modulation control

Y Naitou、N Ookubo (1.Silicon Systems Research Laboratories, NEC Corporation)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-1-6] Valence-Mended Si(100) for Nanoelectronic Applications

M. Tao、W. P. Kirk、D. Udeshi、S. Agarwal、E. Maldonado、N. Basit (1.Department of Electrical Engineering and NanoFAB Center University of Texas at Arlington)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-1] Nondestructive Characterization of Pore Size Distributions in Porous Low-k Films by in-situ Spectroscopic Ellipsometry in Vapor Cell

Chie Negoro、Nobuhiro Hata、Takamaro Kikkawa (1.Advanced Semiconductor Research Center, National Institute of Advanced Industrial Science and Technology、2.MIRAI Project, Advanced Semiconductor Research Center, AIST、3.Research Center for Nanodevices and Systems, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-2] Accurate measurement of mechanical properties of nanoporous silica ultra-low-k films

Yutaka Seino、Rie Ichikawa、Hirofumi Tanaka、Takamaro Kikkawa (1.MIRAI Project, ASRC, AIST、2.ASRC, AIST、3.MIRAI Project, ASET、4.RCNS, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-3] Mechanical Property and Skeletal Silicate Structure of Periodic Porous Silica Films

Syozo Takada、Nobuhiro Hata、Yutaka Seino、Kazuhiro Yamada、Yoshiaki Oku、Takamaro Kikkawa (1.Advanced Semiconductor Research Center , AIST、2.MIRAI Project-ASRC, AIST、3.MIRAI Project-ASET、4.Research Center for Nanodevices and Systems, Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード

[D-2-4] Determination of the Mechanical Properties of Thin Periodic Porous Silica Films by Laser-Generated Surface Acoustic Wave Technique

Xia Xiao、Nobuhiro Hata、Kazuhiro Yamada、Hirofumi Tanaka、Takamaro Kikkawa (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), AIST、2.MIRAI Project, ASET、3.Research Center for Nanodevices and Systems (RCNS), Hiroshima University)

2003 International Conference on Solid State Devices and Materials |PDF ダウンロード