The Japan Society of Applied Physics

741 results (191 - 200)

[E-9-2] Enabling epitaxy on ultrathin implanted SOI

L. Grenouillet1, N. Possémé1, S. Ponoth2, N. Loubet3, V. Destefanis1, Y. Le Tiec1, S. Mehta2, A. Kumar2, Q. Liu3, B. Haran2, K. Cheng2, N. Berliner2, J. Fullam2, J. Kuss2, G. Shahidi2, O. Faynot1, B. Doris2, M. Vinet1 (1.CEA-LETI , FRANCE, 2.IBM, 3.STMicroelectronics , USA)

2011 International Conference on Solid State Devices and Materials |PDF Download

741 results (191 - 200)