The Japan Society of Applied Physics

[H-1-02] Moisture Barrier Properties of Single-Layer Graphene Deposited on Cu Films for Cu Metallization

P. Gomasang1, T. Abe1, K. Kawahara2, Y. Wasai3, N. Nabatova-Gabain3, N. T. Cuong4, H. Ago2, S. Okada5, K. Ueno1,6 (1.Shibaura Inst. of Tech. (Japan), 2.Kyushu Univ. (Japan), 3.Horiba Ltd. (Japan), 4.NIMS (Japan), 5.Univ. of Tsukuba (Japan), 6.SIT Res. Center for Green Innov. (Japan))

2017 International Conference on Solid State Devices and Materials |2017年9月20日(水) 14:00 〜 14:15 |PDF ダウンロード