The Japan Society of Applied Physics

763 results (111 - 120)

[E-2-03] Single and Double Diffusion Breaks in 14nm FinFET and Beyond

K. Miyaguchi1, F. Bufler1, T. Chiarella1, P. Matagne1, N. Horiguchi1, A. D. Keersgieter1, G. Eneman1, A. Spessot1, B. Parvais1,2, D. Verkest1, A. Mocuta1 (1.IMEC (Belgium), 2.Vrije Universiteit Brussel (Belgium))

2017 International Conference on Solid State Devices and Materials |Wed. Sep 20, 2017 4:30 PM - 4:50 PM |PDF Download

763 results (111 - 120)